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P-915KPPS XY-Theta-Z Piezo Stage

3 Degrees of Freedom in the XY Plane

PI P-915KPPS
    • Travel ranges 250 µm × 250 µm, 16 mrad
    • Frictionless, high-precision flexure guiding system
    • High stiffness over 1 N/µm
    • Outstanding lifetime due to PICMA® piezo actuators

Specifications

Travel

Resolution

Load capacity

Settling time (system
combination with E-621)

Dimensions

P-915KPPS
XY-Theta-Z Stage

250 µm × 250 µm

± 8 mrad

3 nm

15 µrad

2 kg

45 ms (250 µm)

28 ms (16 mrad)

60 mm × 60 mm × 100 mm

Order Information

P-915KPPSXYθZ Nanopositioning System, 250 × 250 µm, 16 mrad

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