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S-303 Piezo Phase Shifter

High-Speed Piezo Phase Shifters with Direct Metrology Option

PI S-303
    • Resonant frequency 25 kHz for sub-millisecond dynamics
    • Capacitive sensor option for highest linearity and stability
    • 3 µm travel range
    • Compact size: Ø 30 mm × 10 mm
    • Open-loop versions with aperture
    • Invar option for highest thermal stability

Specifications

S-303.CDx

S-303.0Lx

Unit

Tolerance

Active axis

Z

Z

Open-loop travel, at -20 to 120 V

3

3

µm

±20 %

Closed-loop travel

2

µm

Integrated feedback sensor

Capacitive

Resolution, closed-loop /
open-loop*

0.03 / 0.03

0.03 / –

nm

Linearity error, closed-loop**

1.0

%

typ.

Repeatability

0.7

nm

typ.

Stiffness

N/µm

±20 %

Push / pull force capacity

0.5

0.5

N

max.

Electrical capacitance

0.9

0.9

µF

±20 %

Dynamic operating current coefficient (DOCC)***

50

50

µA/(Hz × µm)

Resonant frequency, no load

25

25

kHz

±20 %

Operating temperature range

-20 to 80

-20 to 80

°C

Voltage connection

E

VL

Sensor connection

E

Mass

100

30

g

±5 %

Casing material

Al (Invar optional)

Al (Invar optional)

Recommended amplifiers / controllers

E-665.CR
E-610.C0
E-661.CP
E-625.CR
E-753
E-750

E-663
E-610.00
E-500 / E-501
E-503
Optional: E-515 / E-516

* The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E -503 amplifier or E-710 controller.
** With digital controller, analog controllers will provide a linearity of typ. 1 nm.
*** Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 1 µm at 10 Hz requires approximately 0.5 mA drive current.

Drawings / Images

PI S-303.0Lx Drawing PI S-303.CDx Drawing PI S-303 Diagramm

Order Information

S-303.0LPiezo Phase Shifter, 3 µm, Open-Loop

S-303.CDPiezo Phase Shifter, 3 µm, Capacitive Sensor

S-303.0LiPiezo Phase Shifter, 3 µm, Open-Loop, Invar

S-303.CDiPiezo Phase Shifter, 3 µm, Capacitive Sensor, Invar

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Controllers / Drivers / Amplifiers

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png PI Datasheet S-303
Piezo Phase Shifter High-Speed Piezo Phase Shifters with Direct Metrology Option
PDF 906 K