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S-310 – S-316 Piezo Z / Tip / Tilt Scanner

High-Speed System with Clear Aperture

PI S-310
    • 10 mm clear aperture
    • Piezo tripod design
    • Optical beam deflection to 2.4 mrad
    • Piston movement up to 12 µm (phase shifter)
    • Sub-ms response time
    • Sub-µrad resolution
    • Closed-loop versions for higher precision
    • For optics, mirrors or other components
    • Frictionless, high-precision flexure guiding system
    • Parallel kinematics for enhanced dynamics and better multi-axis accuracy

Specifications

S-310.10

S-314.10

S-311.10

S-315.10

S-316.10

Unit

Tolerance

Active axes

Z

Z

Z, θX, θY

Z, θX, θY

Z, θX, θY

Motion and positioning

Integrated sensor

SGS

Open-loop travel in Z at 0 to 100 V

6 / –

12 / –

6 / –

12 / –

12 / 12

µm

min. (+20 %/-0 %)

Open-loop tip / tilt angle, 0 to 100 V

600

1200

1200

µrad

min. (+20 %/-0 %)

Closed-loop travel in Z

12

µm

Closed-loop tilt angle

1200

µrad

Open-loop resolution in Z

0.1

0.2

0.1

0.2

0.2

nm

typ.

Open-loop resolution in θX, θY

0.02

0.05

0.05

µrad

typ.

Closed-loop resolution in Z

0.4

nm

typ.

Closed-loop resolution in θX, θY

0.1

µrad

typ.

Linearity error

0.2

%

typ.

Mechanical properties

Stiffness in Z

20

10

20

10

10

N/µm

±20 %

Resonant frequency, no load, in Z

9.5

5.5

9.5

5.5

5.5

kHz

±20 %

Resonant frequency, under load (with 15 mm x 4 mm glass mirror)

6.5

4.4

6.5

4.1

4.1

kHz

±20 %

Resonant frequency, under load (with 20 mm x 4 mm glass mirror)

6.1

4.2

6.1

3.4

3.4

kHz

±20 %

Distance of pivot point to platform surface

5

5

5

mm

±1 mm

Platform moment of inertia

150

150

150

g × mm²

±20 %

Drive properties

Ceramic type

PICMA®
P-882

PICMA®
P-882

PICMA®
P-882

PICMA®
P-882

PICMA®
P-882

Electrical capacitance

0.39

0.93

0.39

0.93

0.93

µF

±20 %

Dynamic operating current coefficient (DOCC)

8

10

8

10

10

µA / (Hz × mrad)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Steel

Steel

Steel

Steel

Steel

Mass

0.053

0.055

0.045

0.055

0.055

kg

±5 %

Cable length

2

2

2

2

2

m

±10 mm

Sensor connection

LEMO

Voltage connection

LEMO

LEMO

LEMO

LEMO

LEMO

Resolution of PI piezo scanners is not limited by friction or stiction. Value given is noise equivalent motion with E -503 amplifier.

Mechanical tilt, optical beam deflection is twice as large. For maximum tilt range, all three piezo actuators must be biased at 50 V. Due to the parallel-kinematics design, linear travel and tilt angle are interdependent. The values quoted here refer to pure linear / pure angular motion (equations).

Recommended controller / amplifier
Single-channel (1 per axis): E -610 servo controller / amplifier, E -625 servo controller, bench-top
Multi-channel: modular piezo controller system E-500 with amplifier module E-503 (three channels) or E-505 (1 per axis, high-power) and E-509 controller (optional), E-516 interface modul (optional)

Drawings / Images

PI S-310 Drawing PI S-315 Drawing PI S-316 Drawing

Order Information

S-310.10Piezo Actuator, Clear Aperture, 6 µm, LEMO Connector(s)

S-311.10Piezo Z/Tip/Tilt Platform, Clear Aperture, 600 µrad, 6 µm, LEMO Connector(s)

S-314.10Piezo Actuator, Clear Aperture, 12 µm, LEMO Connector(s)

S-315.10Piezo Z/Tip/Tilt Platform, Clear Aperture, 1.2 mrad, 12 µm, LEMO Connector(s)

S-316.10Piezo Z/Tip/Tilt Platform, Clear Aperture, 1.2 mrad, 12 µm, SGS, LEMO Connector(s)

S-316.10DPiezo Z/Tip/Tilt Platform, Clear Aperture, 1.2 mrad, 12 µm, SGS, Sub-D Connector(s)

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Controllers / Drivers / Amplifiers

Accessories

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png User Manual PZ96E
S-310, S-311, S-314, S-315, S-316 Piezo Z/Tip/Tilt Scanner
PDF 248 K 1.1.0 EN
fileadmin/images/filelist/pdf.png PI Datasheet S-310 – S-316
Piezo Z / Tip / Tilt Scanner High-Speed System with Clear Aperture
PDF 803 K
fileadmin/images/filelist/zip.png S-316 STEP
ZIP 25 K