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S-325 Piezo Z / Tip / Tilt Platform

High-Speed Tripod System for Mirrors and Optics

PI S-325
    • Optical beam deflection to 10 mrad
    • Resolution to 50 nrad
    • Piston movement up to 30 µm (for path length adjustment)
    • Compact tripod design: parallel kinematics with a common platform maintains the direction of polarization
    • Sub-ms response time
    • Closed-loop versions for higher precision
    • For Mirrors up to Ø 25 mm (1")
    • Frictionless, high-precision flexure guiding system
    • Parallel kinematics for enhanced dynamics and better multi-axis accuracy

Specifications

S-325.30L

S-325.3SL

S-325.3SD

Unit

Tolerance

Active axes

Z, θX, θY

Z, θX, θY

Z, θX, θY

Motion and positioning

Integrated sensor

0

SGS

SGS

Open-loop travel in Z at 0 to 100 V

30

30

30

µm

min. (20 % / -0 %)

Open-loop tip / tilt angle, 0 to 100 V

5

5

5

mrad

min. (20 % / -0 %)

Closed-loop travel in Z

30

30

µm

Closed-loop tip / tilt angle in θX, θY

4

4

mrad

Open-loop resolution in Z

0.5

0.5

0.5

nm

typ.

Open-loop resolution in θX, θY

0.05

0.05

0.05

µrad

typ.

Closed-loop resolution in Z

0.6

0.6

nm

typ.

Closed-loop resolution in θX, θY

0.1

0.1

µrad

typ.

Mechanical properties

Unloaded resonant frequency in Z

2

2

2

kHz

±20 %

Resonant frequency, under load
(with 25 mm x 8 mm glass mirror)

1

1

1

kHz

±20 %

Distance of pivot point to platform surface

6

6

6

mm

±0.5 mm

Platform moment of inertia

515

515

515

g × mm²

±20 %

Drive properties

Ceramic type

PICMA®
P-885

PICMA®
P-885

PICMA®
P-885

Electrical capacitance

9.3

9.3

9.3

µF

±20 %

Dynamic operating current coefficient

39

39

39

µA / (Hz × mrad)

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

°C

Material case

Aluminum

Aluminum

Aluminum

Mass

0.065

0.065

0.065

kg

±5 %

Cable length

2

2

1.5

m

±10 mm

Sensor / voltage connection

LEMO

LEMO

Sub-D

For maximum tilt range, all three piezo actuators must be biased at 50 V. Due to the parallel-kinematics design linear travel and tilt angle are interdependent. The values quoted here refer to pure linear / pure angular motion (equations).

Recommended controller / amplifier

Versions with LEMO connector: E-500 modular piezo controller system with E-503.00 amplifier module (three channels) or 3 x E-505.00 (high speed applications) and E-509 controller (optional)
Single-channel (1 per axis): E-610 OEM servo controller / amplifier, E-625 servo controller, bench-top
Versions with Sub-D connectors: E-616 servo controller for tip / tilt mirror systems, supports both tilt axes, but not the motion in Z

Drawings / Images

PI S-325 Drawing PI S-325 Drawing

Order Information

S-325.3SDHigh-DynamicsPiezo Z / Tip / Tilt Platform, 5 mrad, 30 µm, SGS, Sub-D Connector(s)

S-325.3SLHigh-DynamicsPiezo Z / Tip / Tilt Platform, 5 mrad, 30 µm, SGS, LEMO Connector(s)

S-325.30LHigh-DynamicsPiezo Z / Tip / Tilt Platform, 5 mrad, 30 µm, Open-Loop, LEMO Connector(s)

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Controllers / Drivers / Amplifiers

Accessories

Related Products

Articles and Links

Downloads

fileadmin/images/filelist/pdf.png User Manual PZ148E
S-325 Piezo Z/Tip/Tilt Platform
PDF 305 K 1.0.0 EN
fileadmin/images/filelist/pdf.png PI Datasheet S-325
Piezo Z / Tip / Tilt Platform High-Speed Tripod System for Mirrors and Optics
PDF 810 K
fileadmin/images/filelist/zip.png S-325 STEP
ZIP 232 K