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Overview

Integrated Piezo Actuators

Sub-Millisecond Response Time and Sub-Nanometer Resolution

  • Case with mechanical adapters for electrical insulation, simple integration and for protecting the actuator from ambient conditions
  • Mechanical preload allows dynamic operation
  • Flexure guides
    for straight motion
  • Mechanical lever amplification integrated into the flexure guide for large travel ranges
  • SGS sensors for repeatabilities down to a few nanometers
Piezo actuator

Applications

Mechanical integration of piezo actuators facilitates their application. To avoid pull forces at the piezo element, which necessarily occur in dynamic applications due to the inertia of the moving load, the piezo element must be provided with a mechanical preload. This can be done in mechanical cases or by means of flexure joints. The latter additionally guide or deflect the direction of motion or increase the travel range through lever amplification. PI's preloaded integrated piezo actuators offer an integration level between the pure piezo element and the piezo positioning system for simple positioning tasks.

Lever-Ampl. PiezoMove®

PiezoMove® Lever-Amplified Actuators: Guided Actuators with Travel Ranges of up to 2 mm

Guided and preloaded multilayer piezo actuators with lever amplification are used for valves, pumps, micro- and nanoliter dosing, active vibration isolation, sample handling and imprint technologies in microfluidics, biotechnology, medical technology, mechatronics, adaptive systems technology, laser technology and metrology.

  • Mechanical guiding, preload and lever amplification for travel ranges of up to 2 mm
  • Versions with SGS sensors for repeatabilities down to a few nanometers available

  • Low-cost OEM solutions for integration, also for large quantities
Class*Linear Travel [µm]Resolution [nm]Nonlinearity [%]Active axes
PiezoMove Flexure-Guided Linear Actuator
With Optional Position Sensor
AA100 to 4002 to 120.1 to 0.3Z
PiezoMove High-Stiffness Linear Piezo Actuator
With Flexure Guided Motion Amplifier for Travel Ranges to 1 mm
AA100 to 10002 to 70.5 to 1.5X
Cost-Efficient PiezoMove Linear Flexure Actuator
Frictionless Guidings and Travel Ranges to 0.5 mm
A100 to 5006 to 100.2Z
Compact PiezoMove Linear Actuator
Cost-Efficient, with 300 µm Travel Range
A300

Z
Preloaded PICMA®

Compact Actuators: Preloaded PICMA® Piezo Linear Actuators

Applications that simultaneously have high precision and dynamic requirements are found, among others, in fluidics and metering technology or in precise alignment of slit widths in optics or production technologies. Vacuum designs down to 10-9 hPa are available.

  • Sub-millisecond response time and sub-nanometer resolution
  • Versions with SGS positioning sensor available

  • Waterproof versions available
Linear Travel [µm]Resonant Frequency [Hz]Push/Pull Force [N]SensorResolution [nm]Voltage Range [V]Nonlinearity [%]
Preloaded Piezo Actuators
For High Loads and Force Generation, Optional with Integrated Position Sensors
15 to 9018000 to 6000

800 / 300

– / SGS0.3 to 1.8-20 to 120

Preloaded Piezo Actuators
Optional with Integrated Position Sensor
15 to 9018000 to 60001000 / 50– / SGS0.3 to 1.8-20 to 120

Piezo Actuators
For Light and Medium Loads
15, 30, 4522000 to 850050 / 1

-20 to 120

Preloaded Piezo Actuators
For Light and Medium Loads
15, 30, 4522000 to 1200050 / 10

-20 to 120

Encapsulated PICMA® Stack Piezo Actuators
For Tough Industrial Environments
17, 36

60 to 35

to 3000 / 0– / DMS

-20 to 120

Preloaded PICA

High-Load Actuators: Preloaded Compact PICA Piezo Linear Actuators

Highly dynamic applications that simultaneously have high precision and force generation requirements can be found, among others, in precision mechanical engineering, material processing, material forming, and in active compensation of vibrations. Designs for vacuums down to 10-9 hPa and for particularly high or low operating temperatures are available.

  • Sub-millisecond response time and sub-nanometer resolution
  • Compact stainless steel case with variable end pieces

  • Versions with SGS positioning sensor available
Linear Travel [µm]Resonant Frequency [Hz]Push/Pull Force [N]SensorResolution [nm]Voltage Range [V]Nonlinearity [%]
PICA Power Piezo Actuator
Preloaded Piezo Actuators (HVPZT) with Sensor Option
15 to 18017000 to 45002000 / 300– / SGS0.3 to 2.4to 1000 0.2
PICA Power Piezo Actuator
Preloaded Piezo Actuators (HVPZT) with Sensor Option
15 to 18017000 to 30004500 / 500– / SGS0.3 to 3.6to 10000.2
PICA Power Piezo Actuators
Preloaded High-Load Piezo Actuators (HVPZT) with Sensor Option
15 to 18014000 to 400012500 / 2000– / SGS0.3 to 2.4to 1000 0.2
PICA Power Piezo Actuators
Preloaded High-Load Piezo Actuators (HVPZT) with Sensor Option
15 to 18014000 to 280030000 / 3500– / SGS0.3 to 3.6to 10000.2
*   AAA   Reference class
  AA Precision class
  A Standard class

 

 

Motion Controllers

Motion Controllers and Amplifiers

PI offers a wide range of options for controlling integrated piezo actuators from cased digital motion controllers to OEM PCBs:

Which Drive Electronics
is Suitable?
 
PiezoMove® / PICMA®
without Sensors
U <120 V
PICA
without Sensors
U <1000 V
PiezoMove® / PICMA®
with Strain Gauge Sensors

PICA
with Strain Gauge Sensors

Mid-range dynamics,
mid-range loads
>> E-836
>> E-610
E-420 >> E-610
>> E-625
E-420
Mid-range dynamics,
mid-range loads,
large quantities
>> E-831 >> E-462
Fast switching applications
 
>> E-617
>> E-618
>> E-506
>> E-481
 
 
>> E-500
 
 
>> E-481
 
 
High loads
(>100 kg)
E-420 E-420
Technology