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Overview

Precision Linear Positioning Stages

Travel Ranges From a Few Millimeters to 1 m

  • Large selection of positioning stages for different accuracies, loads or sizes
  • Many motorization variants: Stepper motors, DC motors, brushless motors, magnetic direct drives
  • Piezomotors replace electric motors in miniature stages
  • Optional efficient ActiveDrive drive concept for high performances
Linear Positioning Stages

Applications

PI offers a wide range of linear positioning stages for any conceivable application. For motions and positionings in several axes, the positioning stages can also be combined. For this, it is irrelevant which drive concepts are used, since the axes can be controlled via >> Uniform Software. In addition to that, for multi-axis applications, >> XY Stages or parallel-kinematic >> Hexapods with up to 6 degrees of freedom of motion can be used.

Piezomotors

Linear Positioning Stages with Piezomotors

>> Piezoelectric Linear Motors allow production of stages with minimum dimensions. The direct drive avoids mechanical components such as gears and spindles, making for reliable and high-resolution drives down to a few nanometers. Depending on the drive principle, high velocity, high forces and/or high resolution are achieved.

  • Vacuum-compatible and nonmagnetic operating principle
  • Self-locking, no energy consumption and no heat generation at stop

  • Linear encoders for determining the position directly without mechanical backlash
Class*Linear Travel [mm]Resolution [nm]Velocity [mm/s]Push/Pull Force [N]Motor / Drive
Linear Piezo StageAAA6.5 to 261105Inertia piezomotors
Miniature Positioning Stage
With <1 Nanometer Sensor Resolution
AAA150.5 to 1501010PiezoWalk drive
Compact Linear Positioning Stage
Fast Linear Motor, Linear Encoder
AA18100 / 6002502

Ultrasonic piezomotor

Linear Piezo StageAAA13 to 2611010Inertia piezomotor
Linear Piezo StageAAA13 to 520.51010PiezoWalk drive
Precision Stage with Linear Piezo Drive
Fast, Self-Locking, Low Profile
AA251004002.5Ultrasonic piezomotor
Dynamic Micropositioning Stage
Low Profile, Linear Encoder
AA

50

100

350

6

Ultrasonic piezomotor
High-Resolution Translation Stage
Nanometer Step Sizes
AAA300.51010PiezoWalk drive
Compact

Small Precision Linear Positioning Stages

Compact drive solutions are indispensable for automated sequences in many areas ranging from micro-processing in precision mechanical engineering to photonics production. These small positioning stage series are highly suitable both for test systems and for use in the production process. Different motorizations, positioning accuracy and travel ranges offer a wide range of possible fields of application.

  • Travel ranges to 100 mm
  • Different motorization types

  • Positioning stage width from 22 mm
Class*Linear Travel [mm]Resolution [nm]Velocity [mm/s]Motor / DriveSensor
Compact Micro-Translation Stage
Choice of Drives & Travel Ranges, XY(Z) Combinations Possible
AA5 to 257 to 501 to 2DC motor, stepper motorIncemental encoder
Linear StageAA13 to 52110.4 to 5DC motor, stepper motorIncremental encoder
Precision Micro-Translation Stage
Fast & Compact with Direct Position Measurement
AA2510020DC motorIncremental encoder, direct metrology
Micro StageAAA13 to 52508DC motor, stepper motor

Incremental encoder, direct metrology

Linear StageA26 to 10250013 to 20DC motor, stepper motorIncremental encoder
High-Accuracy Translation Stage
Ultra-Compact, with Direct Position Measurement
AAA25 to 5010050DC motorIncremental encoder, direct metrology
Linear Piezo StageAAA6.5 to 26110Inertia piezomotorsIncremental sensor, direct metrology
Miniature Positioning Stage
With <1 Nanometer Sensor Resolution
AAA150.5 to 15010PiezoWalk drivePIOne encoder, direct metrology
Compact Linear Positioning Stage
Fast Linear Motor, Linear Encoder
AA18100 / 600250

Ultrasonic piezomotor

Incremental encoder, direct metrology
Loads of up to 200 N

Linear Positioning Stages for Medium Loads of up to 200 N

Possible applications range from process automation to industrial testing systems and quality assurance tasks. These stage series reliably position loads in the medium range from 50 to 200 N. A large number of variants can be selected to perfectly suit the particular situation.

  • Preloaded precision leadscrews or ball screws for high velocity and large number of cycles
  • Variable travel ranges from 25 to 600 mm

  • XY and XYZ combinations
Class*Linear Travel [mm]Resolution [nm]Velocity [mm/s]Push/Pull Force [N]Motor / Drive
Precision Translation Stage
Cost-Effective, Large Choice of Drives & Travel Ranges
A25 to 20018 to 2502.5 to 1050DC motor, stepper motor
High-Load Precision Stage
Cost-Effective, Large Choice of Drives & Travel Ranges for High Loads
A100 to 30018 to 2503 to 1050DC motor, stepper motor
Precision Linear Stage
500 mm Travel with High Guiding Accuracy
AA500500100200DC motor
Translation StageA25 to 30050013 to 2050DC motor, stepper motor
Translation StageAA50 to 600200050 to 15018 to 50DC motor, stepper motor
Precision Linear Stage
Cost-Effective With High Guiding Accuracy
AA50 to 1509 to 1251 to 1550DC motor, stepper motor
Linear StageAAA / AA52 to 1551.6 to 507 to 10080DC motor, stepper motor
Linear StageAAA / AA155 to 50850 to 25075 to 200200DC motor, stepper motor
Precision Linear Stage
High Velocity, High Precision
AAA / AA16 to 15550 to 100020 to 9060DC motor, stepper motor
Travel Ranges to 1 m

Linear Positioning Stages for Travel Ranges from 300 mm to 1 m

Industrial applications in the production process such as laser processing benefit from the precise positioning accuracy of these positioning stages. Their low profile makes the variable stage series suitable for universal use, ranging from testing systems to production lines in precision automation.

  • Depending on model: Covered mechanics as dust and dirt protection
  • Combinations of different motorizations and variable travel ranges

  • High stiffness and mechanical stability
Class*Linear Travel [mm]Resolution [nm]Velocity [mm/s]Push/Pull Force [N]Motor / Drive
High-Load Precision Stage
Cost-Effective, Large Choice of Drives & Travel Ranges for High Loads
A100 to 30018 to 2503 to 1050DC motor, stepper motor
Precision Linear Stage
500 mm Travel with High Guiding Accuracy
AA500500100200DC motor
Linear StageAAA / AA155 to 50850 to 25075 to 200200DC motor, stepper motor
High Precision StageAAA / AA52 to 30510035 to 90100DC motor, stepper  motor
High-Precision Linear Translation Stage
High Travel Accuracy, Large Travel Ranges, Many Motor Variants
AAA / AA102 to 30620 to 5006 to 10080DC, BLDC and stepper motor
Linear StageAAA / AA155 to 106050 to 25050 to 150260 to 400DC motor, stepper motor
Precise

High-Precision Reference-Class Linear Positioning Stages

The areas of application of these stage series are among the most demanding in precision positioning. They include inspection of wafers in semiconductor technology, alignment and integration of testing devices in photonics production or measuring and inspection tasks in quality assurance.

  • Excellent long-term stability through high-stiffness basic profiles
  • High-precision components such as crossed roller guides and zero-backlash ball screws

  • Optionally direct position measurement with linear encoder
Class*Linear Travel [mm]Resolution [nm]Velocity [mm/s]Push/Pull Force [N]Motor / Drive
Linear StageAAA / AA52 to 1551.6 to 507 to 10080DC motor, stepper motor
Linear StageAAA / AA155 to 50850 to 25075 to 200200DC motor, stepper motor
Precision Linear Stage
High Velocity, High Precision
AAA / AA16 to 15550 to 100020 to 9060DC motor, stepper motor
High Precision StageAAA / AA52 to 30510035 to 90100DC motor, stepper  motor
High-Precision Linear Translation Stage
High Travel Accuracy, Large Travel Ranges, Many Motor Variants
AAA / AA102 to 30620 to 5006 to 10080DC, BLDC and stepper motor
Nano-Precision Heavy-Duty Stage
Hybrid DC / Piezo Precision Stage, High Speed, 2 nm Resolution
AAA10025080DC motor plus piezo hybrid
Linear StageAAA / AA155 to 106050 to 25050 to 150260 to 400DC motor, stepper motor
High-Resolution Translation Stage
Nanometer Step Sizes
AAA300.51010PiezoWalk drive
Ultra Precision Linear StageAAA55 to 2051 to 5018 to 100100DC motor, stepper motor
Magnetic Direct Drives

PIMag® High-Speed Stages with Direct Drive

Especially industrial applications use the reliability and excellent precision of these magnetic direct-drive positioners and scanners. Their high dynamics ensures high throughputs of automated tasks in testing systems, for example, in the semiconductor industry. They also increase efficiency, for example, in electronics production lines or laser processing.

  • Direct drive without any additional mechanical components, i.e., fewer wear parts
  • High velocities of several 100 mm/s

  • Combinable with highly dynamic direct-drive rotation stages
Class*Linear Travel [mm]Resolution [nm]Velocity [mm/s]Push/Pull Force [N]Motor / Drive
Ultra Precision Linear StageAAA52 to 2051 to 1560022Magnetic linear motor
Linear Motor StageAAA155 to 5081550050Magnetic linear motor
QuickScan High-Dynamics Scanner
Voice Coil Drive with Direct Position Measurement
AA6 to 201002703.3 to 5Voice coil drive
Z Stages

Precision Z Stages

For motions in Z, special Z stages are available, which can be combined with linear positioning stages or rotation stages as compactly as possible. As an alternative to Z stages, linear positioning stages can be used for Z motions by means of adapter brackets, thus allowing also longer travel ranges to be achieved. These Z stages are designed especially for loads of up to 300 N, so that they can also carry additional stage axes, if necessary.

  • Different load classes
  • Travel ranges to 25 mm

  • With integrated limit switches
Class*Linear Travel [mm]Resolution [nm]Velocity [mm/s]Push/Pull Force [N]Motor / Drive
High-Load Precision Z Stage
Combinations with Piezo Nanopositioning Stages Possible
A12.5

3 to 42

0.5 to 3120DC motor, stepper motor
Ultra Precision Elevation StageAAA13136150 to 200DC motor, stepper motor
Nano Precision Elevation StageAAA1310.2300Stepper motor
Elevation StageAA13 to 2620 to 50 to 26

30 to 55

DC motor, stepper motor
Precision Z Stage
Compact XYZ Combinations with M-511 Translation Stage Series
AA12.55 to 241 to 320 to 100DC motor
Vacuum

Linear Positioning Stage for Vacuum Applications

Vacuum and ultrahigh-vacuum applications place particularly high demands on mechanical components. Lubricants have to be avoided or replaced with special suitable ones, while the drive and electronic components have to be designed accordingly. Test equipment such as a vacuum chamber equipped with mass spectrometer helps PI to test vacuum products and configure them for individual designs.

  • For vacuums down to 10-9 hPa
  • Piezomotors for particularly small stages
  • Customized designs and modifications
Class*Linear Travel [mm]Resolution [nm]
Linear Piezo StageAAA6.5 to 261
Miniature Positioning Stage
With <1 Nanometer Sensor Resolution
AAA150.5 to 150
Precision Linear Stage
High Velocity, High Precision
AAA / AA16 to 15550 to 1000
Linear StageAAA / AA52 to 1551.6 to 50
*   AAA   Reference class
  AA Precision class
  A Standard class

 

 

Technology

Technology