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Overview

Single-Axis Piezo Linear Stages

Nanopositioning Systems Featuring Travel Ranges to 1.5 mm

  • Excellent precision
  • For dynamic applications
  • PICMA® piezo actuators for maximum reliability
  • Optional capacitive position sensors for positioning accuracy
    and stability in the nanometer range
  • Frictionless and zero-backlash flexure guides
Piezo Linear Stage

Applications

PI's piezo actuator linear stages combine nanometer-precision resolution and guiding precision with minimum crosstalk. This makes them particularly suitable for reference applications in metrology, for microscopic processes, for interferometry or in inspection systems for semiconductor chip production.

Dynamic

Highly Dynamic Linear Stage

  • Excellent travel accuracy through flexure guides
  • High stiffness and dynamics through direct force transmission
  • Sub-nanometer resolution, travel ranges to 100 µm
Class*Linear Travel [µm]Resolution [nm]Resonant Frequency [Hz]Sensor
High-Dynamics Nanopositioning System
1 Axis with Large Clear Aperture
AAA800.2

3250

Capacitive
Piezo Nanopositioning System
High-Load Piezo-Driven Nanopositioning Systems with Direct Metrology
AAA750.4600Capacitive (Option)
High Precision Nanopositioning Stage
High-Dynamics, Very Stable Piezo Scanner with Extreme Guiding Accuracy
AAA300.13200Capacitive
LISA Linear Actuator & Stage
High-Dynamics, Very Stable Piezo Nanopositioner
AAA380.055600Capacitive
Linear Piezo Scanner
Compact OEM System
A4021550SGS
Modular

Modular Piezo Systems for 1 to 3 Axes

  • Nanocube®: Low-cost positioning of up to 3 axes
  • PIHera: Flexible travel ranges to 1.5 mm

Class*Linear Travel [µm]Resolution [nm]Resonant Frequency [Hz]Sensor
PIHera Piezo Linear Stage
Variable Travel Ranges and Axis Configuration
AAA50 to 15000.2 to 31100 to 125Capacitive
Linear Piezo Positioning System
Cost-Effective, Compact Linear Positioning System
AA1002400SGS
*   AAA   Reference class
  AA Precision class
  A Standard class
Technology