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S-330 qXqY Ultra-Fast Piezo Tip/Tilt Platforms
S-330 Piezo Tip/Tilt Platforms are fast and compact tilt units, providing precise angular movements of the top platform in two orthogonal axes. The tilt range is ±1 mrad (each axes) with sub-µrad resolution. Closed loop versions are available for highest accuracy and repeatability. S-330 systems are designed for mirrors up to 50 mm diameter and have outstanding angular stability over a wide temperature range. To match the CTE of Zerodur glass, the S-330 is equipped with an Invar top platform.
- ±1mrad qX and qY Tilt Range
- For Mirrors to 50 mm Æ
- Sub-µrad Resolution
- Closed Loop Versions
- Differential Design for Excellent Temperature Stability
A) Drive Electronics for High Dynamic Applications
E-500 Chassis with 2 x standard and 1 x specially configured E-505.00 Amplifier Modules, optional specially configured E-509.S3 Position Servo Controller Module (required for closed loop operation, see "Piezo Control Electronics" section for details).B) Drive Electronics for Static and Medium Dynamic Applications
E-500 Chassis with specially configured E-503.00 Amplifier Module, optional specially configured E-509.S3 Position Servo Controller Module (required for closed loop operation, see "Piezo Control Electronics" section for details).Application examples:
Image stabilization, laser beam stabilzation, adaptive optics systems, laser beam steering & scanning, correction of polygon scanner errors.Working principle:
S-330 Tilt Platforms are equipped with two pairs of low voltage piezoelectric linear drives (0 to 100 V) operating in push/pull mode (Click for schematic diagram). The stainless steel case is equipped with an integrated, FEA (Finite Element Analysis) modeled circular flexure featuring zero stiction/friction and exceptional guiding precision.In open loop operation, the platform angle roughly corresponds to the drive voltage (see "Tutorial: Piezoelectrics in Positioning" section for behavior of open loop piezos). The open loop model is ideal for applications where the position is controlled by an external loop based on data provided by a sensor (e.g. quad cell, CCD chip, ...).
The closed loop version is equipped with two pairs (one per axis) of Strain Gage sensors operated in a bridge circuit for ultra-high resolution and angular stability. They provide sub-µrad resolution and repeatability (with PI control electronics).
