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S-330 qXqY Ultra-Fast Piezo Tip/Tilt Platforms
ORDERING INFORMATION:
S-330.10 qX and qY Piezo Tilt Platform ±1 mrad, Strain Gage Sensor
S-330.30 qX and qY Piezo Tilt Platform ±1 mrad
TECHNICAL DATA: Models
S-330.30
S-330.10
Units
Active axes
q X,q Y
q X,q Y
Open loop tilt angle @ 0 to 100 V
±1
±1
mrad ± 20 %
A2
Closed loop tilt angle ³
-
±1
mrad
A3
Integrated feedback sensor
-
4 x strain gauge
B
Closed / open loop ** resolution £
- / 0.05
0.1 / 0.05
µrad
C1
Closed loop linearity (typ.)
-
± 0.2
%
Full range repeatability (typ.)
-
± 2
µrad
C3
Electrical capacitance
3.6 / axis
3.6 / axis
µF ± 20 %
F1
* Dynamic operating current coefficient (DOCC)
0.22 / axis
0.22 / axis
µA/(Hz x µrad)
F2
Resonant frequency (f0) without mirror
3.3
3.3
kHz ± 20 %
G2
Resonant frequency w/ Æ 25 x 8 mm glass mirror
2.4
2.4
kHz ± 20 %
G3
Distance pivot point to platform surface (T)
6
6
mm
Platform moment of inertia
1530
1530
gmm²
Operating temperature range
- 20 to 80
- 20 to 80
° C
H2
Voltage connection
3 x VL, 2 m cable
3 x VL, 2 m cable
J1
Sensor connection
-
1 x L, 2 m cable
J2
Weight (w/o cables)
200
200
g ± 5 %
Material (case / platform)
N-S / I
N-S / I
L
* Dynamic Operating Current Coefficient in µA per Hertz and µrad. Example: Sinusoidal scan of 100 µrad at 10 Hz requires approximately 0.22 mA drive current.
** Noise equivalent motion with E-503 amplifier.
