The Latest Information on Piezo Nanopositioning Systems is Available Here
P-752.11C, P-752.21C Miniature Piezo Flexure NanoPositioners and Scanners
- Ideal for Disk Drive Testing and Bragg Grating Writing on Fibers
- Ultra-fast Response (3 kHz Resonant Frequency)
- Ultra-Precise Trajectory Control (1 µrad)
- 0.1 nm Resolution
- Ultra-Fast Digital Controllers with Fiber Interface Available
- Latest Feed Forward Techniques for Elimination of Self-generated Resonances available
Careful attention to mass minimization results in significant reduction in inertial recoil forces applied to the supporting structures enhancing overall system throughput and stability. In combination with the E-612 controller the 15 µm stage (with a 300 g load) settles to better than 0.1% ! in 17 msec (settling to the conventional 2% value can be achieved in the sub-ms range).
Application examples:
Disk drive testing, metrology, nanopositioning, scanning microscopy, fiber optics, scanning interferometry, biotech-nology, micromanipulation etc.
Working principle:
P-752 stages are equipped with low voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction, ultra-high re-solution and exceptional guiding precision. An integrated capacitive position feedback sensor provides sub-nanometer resolution and stability in closed loop operation (with PI electronics).
New Piezo Flexure NanoPositioning and Scanning Stage Selection Guide: Click Here
