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P-752.11C, P-752.21C Miniature Piezo Flexure NanoPositioner and Scanner
Ordering Information:P-752.11C Miniature PZT Flexure Stage, 15 µm, Capacitive Sensor
P-752.21C Miniature PZT Flexure Stage, 30 µm, Capacitive Sensor
See "PZT Control Electronics" section for our comprehensive line of low noise, modular and OEM control elec-tronics for computer and manual control.
| TECHNICAL DATA: | ||||
|
Models |
P-752.11C |
P-752.21C |
Units |
|
|
Active axes |
X |
X |
||
|
Open loop travel @ 0 to 100 V |
20 |
35 |
µm ± 20 % |
A2 |
|
Closed loop travel ³ |
15 |
30 |
µm |
A5 |
|
Integrated feedback sensor |
capacitive |
capacitive |
B |
|
|
Closed / open loop ** resolution £ |
0.1 |
0.2 |
nm |
C1 |
|
Closed loop linearity (typ.) |
0.03 |
0.03 |
% |
|
|
Full range repeatability (typ.) |
±1 |
±2 |
nm |
C3 |
|
Stiffness |
30 |
20 |
N/µm ± 20 % |
D1 |
|
Push/pull force capacity (in operating direction) |
100 / 10 |
100 / 10 |
N |
D3 |
|
Max. (+/-) normal load |
3 |
3 |
kg |
D4 |
|
Lateral force limit |
30 |
30 |
N |
D5 |
|
Tilt (Q Y, Q Z) (typ.) |
1 |
1 |
µrad |
E1 |
|
Electrical capacitance |
2.7 |
4.5 |
µF ± 20 % |
F1 |
|
* Dynamic operating current coefficient (DOCC) |
22 |
19 |
µA/(Hz x µm) |
F2 |
|
Unloaded resonant frequency |
3000 |
2100 |
Hz ± 20 % |
G2 |
|
Resonant frequency @ 300 g load |
980 |
600 |
Hz ± 20 % |
G3 |
|
Operating temperature range |
- 20 to 80 |
- 20 to 80 |
° C |
H2 |
|
Voltage connection |
VL |
VL |
VL |
J1 |
|
Sensor connection |
2 x C |
2 x C |
2 x C |
J2 |
|
Weight (with cables) |
250 |
350 |
g ± 5 % |
|
|
Body material |
N-S |
N-S |
N-S |
L |
|
Recommended amplifier/controller |
H, F, L |
H, F, L |
H, F, L |
M |
* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example: Sinusoidal scan of 10 µm at 10 Hz (P-752.11C) requires approximately 2.2 mA drive current.
** Noise equivalent motion with E-503 amplifier.
