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P-753 LISA Linear PZT Stage Actuator

Ordering Information:
P-753.11C LISA Linear PZT Stage Actuator, 12 µm, Capacitive Sensor
P-753.21C LISA Linear PZT Stage Actuator, 25 µm, Capacitive Sensor
P-753.31C LISA Linear PZT Stage Actuator, 38 µm, Capacitive Sensor

See "PZT Control Electronics" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.

TECHNICAL DATA:
Models	P-753.11C	P-753.21C	P-753.31C	Units	Notes
Active axes	X	X	X
Open loop travel @ 0 to 100 V	12	25	38	µm ± 20 %	A2
Closed loop travel ³	12	25	38	µm	A5
Integrated feedback sensor	capacitive	Capacitive	Capacitive		B
Closed / open loop ** resolution £	0.05 / 0.05	0.1 / 0.1	0.2 / 0.2	nm	C1
Closed loop linearity (typ.)	0.03	0.03	0.03	%
Full range repeatability (typ.)	±1	±2	±3	nm	C3
Stiffness	45	24	16	N/µm ± 20 %	D1
Push/pull force capacity (in operating direction)	100 / 20	100 / 20	100 / 20	N	D3
Max. (+/-) normal load	10	10	10	kg	D4
Lateral force limit	30	30	30	N	D5
Tilt (Q Y, Q Z) (typ.)	2	2	2	µrad	E1
Electrical capacitance	1.8	3.6	5.4	µF ± 20 %	F1
* Dynamic operating current coefficient (DOCC)	18	18	18	µA/(Hz x µm)	F2
Unloaded resonant frequency	5.6	3.7	2.9	kHz ± 20 %	G2
Resonant frequency @ 200 g load	2.5	1.7	1.4	kHz ± 20 %	G3
Operating temperature range	- 20 to 80	- 20 to 80	- 20 to 80	° C	H2
Voltage connection	VL	VL	VL		J1
Sensor connection	2 x C	2 x C	2 x C		J2
Weight (with cables)	150	205	250	g ± 5 %
Body material	S	S	S		L
Recommended Amplifier/Controller	H, F, L	H, F, L	H, F, L		M

* Dynamic Operating Current Coefficient in µA per Hertz and mm.
Example: Sinusoidal scan of 10 mm at 10 Hz requires approximately 1.8 mA drive current.

** Noise equivalent motion with E-503 amplifier.

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