The P-730 series was replaced by the new P-733 series:
P-733 Standard: 100x100 (x10µm)P-733 High Speed: 33x33 (x10µm)
Other XY (XYZ) Piezo Stages
P-730, P-731 XY Piezo Flexure NanoPositioners and Scanners
P-731 Piezoelectrically driven XY-NanoPositioner
- Precision Trajectory Control
- For XY Scanning & Positioning
- 80 x 80 µm & 40 x 40 µm Versions
- Resolution < 1 nm
- 50 x 50 mm Clear Aperture
The 50 x 50 mm clear aperture is ideal for transmitted light applications such as near-field scanning microscopy, confocal microscopy or mask alignment. P-730 and P-731 are designed for applications with loads up to 2 kg.
Application examples:
Scanning microscopy, semiconductor test equipment, precision mask and wafer alignment, scanning interferometry, surface structure analysis, bio-technology, micromanipulation and other applications where single plane, high precision X-Y motion is required.
Working principle:
P-730 and P-731 positioners are equipped with low voltage
piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated capacitive position feedback sensors provide sub-nanometer resolution and stability in closed loop operation (with PI electronics).
New Piezo Flexure NanoPositioning and Scanning Stage Selection Guide: Click Here
