Technical Data: P-500 Series of Multi-Axis Piezo Flexure Nanopositioning Stage / Scanner

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P-500 Series of Multi-Axis Piezo Flexure NanoPositioners and Scanners
Ordering Information:
P-517.2CL XY Piezo Flexure Stage, 100 x 100 ľm, Capacitive Sensor, LEMO Connectors
P-517.3CL XYZ Piezo Flexure Stage, 100 x 100 x 20 ľm, Capacitive Sensor, LEMO Connectors
P-517.3CD XYZ Piezo Flexure Stage, 100 x 100 x 20 ľm, Capacitive Sensor, D-Sub Connector
P-517.RCD X,Y,Q_Z Piezo Flexure Stage, 100 x 100 ľm, ą1 mrad, Capacitive Sensor, D-Sub Connector
P-527.2CL XY Piezo Flexure Stage, 200 x 200 ľm, Capacitive Sensor, LEMO Connectors
P-527.3CL XYZ Piezo Flexure Stage, 200 x 200 x 20 ľm, Capacitive Sensor, LEMO Connectors
P-527.3CD XYZ Piezo Flexure Stage, 200 x 200 x 20 ľm, Capacitive Sensor, D-Sub Connector
P-527.RCD X,Y,Q_Z Piezo Flexure Stage, 200 x 200 ľm, ą2 mrad, Capacitive Sensor, D-Sub Connector
P-557.TCD Z,Q_X,Q_Y Piezo Flexure Stage, 50 ľm, ą0.25 mrad, Capacitive Sensor, D-Sub Connector
P-517.TCD Z,Q_X,Q_Y Piezo Flexure Stage, 100 ľm, ą0.5 mrad, Capacitive Sensor, D-Sub Connector
P-527.TCD Z,Q_X,Q_Y Piezo Flexure Stage, 200 ľm, ą1 mrad, Capacitive Sensor, D-Sub Connector

Notes:
See "PZT Control Electronics" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
Table 1: XY, XYZ, X,Y,Q_Z Stages

TECHNICAL DATA:

Models
P-517.2CL P-527.2CL P-517.3CL         P-517.3CD P-527.3CL        P-527.3CD P-517.RCD
P-527.RCD
Units

Notes

Active axes X,Y X,Y X,Y,Z X,Y,Z X,Y, Q_Z X,Y, Q_Z

Open loop travel @ 0 to 100 V 100 x 100 200 x 200 100 x 100 x 20 200 x 200 x 20 100 x 100 x (±1) 200 x 200 x (± 2) µm ± 20 %
(mrad ± 20 %) A2

Closed loop travel ³ 100 x 100 200 x 200 100 x 100 x 20 200 x 200 x 20 100 x 100 x (±1) 200 x 200 x (± 2) µm (mrad) A5

Integrated feedback sensor 2 x capacitive 2 x capacitive 3 x capacitive 3 x capacitive 3 x capacitive 3 x capacitive B

Closed / open loop ¹⁾ resolution £ 1 2 X,Y: 1; Z: 0.1 X,Y: 2; Z: 0.1 X,Y: 1;
(Q_Z: 300) X,Y: 2;
(Q_Z: 300) nm (nrad) C1

Closed loop linearity (typ.) 0.03 0.03 0.03 0.03 0.03 0.03 %

Full range repeatability (typ.) ±5 ±10 X,Y: ±5; Z: ±2 X,Y:±10; Z: ±2 X,Y: ±5;
(Q_Z: ±0.2) X,Y: ±10;
(Q_Z: ±0.5) nm (µrad) C3

Stiffness 2 1 X,Y: 2; Z: 15 X,Y: 1; Z: 15 X,Y: 2 X,Y: 1 N/µm ± 20 % D1

Push/pull force capacity (in operating direction) 200 / 30 200 / 30 200 / 30;
Z: 50 / 30 200 / 30;
Z: 50 / 30 200 / 30 200 / 30 N D3

Max. (+/-) normal load 50 50 50 50 50 50 N D4

* Electrical capacitance 11 / Axis 11 / Axis X,Y: 11; Z: 7.2 X,Y: 11; Z: 7.2 X,Y: 11 X,Y: 11 µF ± 20 % F1

* Dynamic operating
current coefficient
(DOCC) 13.7 / Axis 6.9 / Axis X,Y: 13.7; Z: 38 X,Y: 6.9; Z: 38 X,Y: 13.7 X,Y: 6.9 µA/(Hz x µm) F2

Unloaded resonant frequency 450 350 450; Z: 800 350; Z: 800 X,Y: 450;
Q_Z: 400 X,Y: 350;
Q_Z: 300 Hz ± 20 % G2

Resonant frequency @ 500 g load 250 190 X, Y: 250 X, Y: 190 X,Y 250 X, Y: 190 Hz ± 20 % G3

Resonant frequency @ 2500 g load 140 110 X, Y: 140 X, Y: 110 X,Y 140 X, Y: 110 Hz ± 20 % G3

Operating temperature range - 20 to 80 - 20 to 80 - 20 to 80 - 20 to 80 - 20 to 80 - 20 to 80 ° C H2

** Voltage connection 2 x VL 2 x VL 3 x VL (1 x D) 3 x VL (1 x D) D D J1

** Sensor connection 4 x C 4 x C 6 x C (1 x D) 6 x C (1 x D) D D J2

Weight (with cables) 1400 1400 1450 1450 1400 1400 g ± 5 %

Body material Al Al Al Al Al Al L

Recommended Amplifier/Controller H, F, L, K H, F, L, K H, F, L, K H, F, L, K K K M

Table 2: Z,Q_X,Q_Y Stages

TECHNICAL DATA:

Models
P-557.TCD
P-517.TCD
P-527.TCD
Units

Notes

Active axes Z, Q_x, Q_y²⁾ Z, Q_x, Q_y²⁾ Z, Q_x, Q_y²⁾

Open loop travel @ 0 to 100 V 50 (±0.28) 100 (±0.56) 200 (±1.13) µm ± 20 %
(mrad ± 20 %) A2

Closed loop travel ³ 50 (±0.25) 100 (±0.5) 200 (±1) µm (mrad) A5

Integrated feedback sensor 3x capacitive 3x capacitive 3x capacitive B

Closed / open loop ¹⁾ resolution £ 0.5 (50) 0.5 (50) 1 (100) nm (nrad) C1

Closed loop linearity (typ.) 0.03 0.03 0.03 %

Full range repeatability (typ.) ±5 (±0.1) ±5 (±0.1) ±10 (±0.1) nm (µrad) C3

Stiffness Z: 4.0 Z: 2.7 Z: 1.5 N/µm ± 20 % D1

Push/pull force capacity (in operating direction) Z: 100/50 Z: 100/50 Z: 100/50 N D3

Max. (+/-) normal load 50 50 50 N D4

* Electrical capacitance Z: 8 Z: 11 Z: 15 µF ± 20 % F1

* Dynamic operating
current coefficient
(DOCC) Z: 20 Z: 13.7 Z: 9.5 µA/(Hz x µm) F2

Unloaded resonant frequency Z: 570
Q_x, Q _y :610 Z: 420
Q_x, Q _y: 460 Z: 320
Q_x,Q _y: 330 Hz ± 20 % G2

Resonant frequency @ 500 g load Z: 410
Q_x,Q _y: 430 Z: 300
Q_x,Q _y: 310 Z: 190
Q_x,Q _y: 210 Hz ± 20 % G3

Resonant frequency @ 2500 g load Z: 240
Q_x,Q _y: 245 Z: 170
Q_x,Q _y: 175 Z: 110
Q_x,Q _y: 120 Hz ± 20 % G3

Operating temperature range -20 to 80 -20 to 80 -20 to 80 ° C H2

** Voltage connection D D D J1

** Sensor connection D D D J2

Weight (with cables) 1380 1400 1420 g ± 5 %

Body material Al Al Al L

Recommended Amplifier/Controller K K K M

* Capacitance and DOCC of rotational axes cannot be stated because rotation is based on combined motion of several linear axes rather than on motion of a dedicated rotational drive. Dynamic Operating Current Coefficient of linear axes is in µA per Hertz and µm.
Example P-527.2xx: Sinusoidal scan of 30 µm at 10 Hz requires approximately 2.1 mA drive current.
** Cable length: 1.5 m. Versions P-5xx.xxD with one D-Sub special connector only (sensor and operating voltage). Versions P-5xx.xxL with LEMO connectors.
1) Noise equivalent motion with E-503 amplifier. 2) Z-versions without tip/tilt on request.

Hexapods    Piezo    Nanopositioning Catalog   Capacitive Sensors   Nanopositioning   Micropositioning   PI USA   Piezo-Nanopositioniersysteme
Piezo Linear Actuator Capacitive Sensor Micropositioning Hexapod Fiber Alignment Motion Control High Speed Steering Mirror Nanopositioning System Piezo Design Piezo Driver Piezo-Driven Nanopositioning & Scanning Systems

TECHNICAL DATA:
Models	P-517.2CL	P-527.2CL	P-517.3CL P-517.3CD	P-527.3CL P-527.3CD	P-517.RCD	P-527.RCD	Units	Notes
Active axes	X,Y	X,Y	X,Y,Z	X,Y,Z	X,Y, Q_Z	X,Y, Q_Z
Open loop travel @ 0 to 100 V	100 x 100	200 x 200	100 x 100 x 20	200 x 200 x 20	100 x 100 x (±1)	200 x 200 x (± 2)	µm ± 20 % (mrad ± 20 %)	A2
Closed loop travel ³	100 x 100	200 x 200	100 x 100 x 20	200 x 200 x 20	100 x 100 x (±1)	200 x 200 x (± 2)	µm (mrad)	A5
Integrated feedback sensor	2 x capacitive	2 x capacitive	3 x capacitive	3 x capacitive	3 x capacitive	3 x capacitive		B
Closed / open loop ¹⁾ resolution £	1	2	X,Y: 1; Z: 0.1	X,Y: 2; Z: 0.1	X,Y: 1; (Q_Z: 300)	X,Y: 2; (Q_Z: 300)	nm (nrad)	C1
Closed loop linearity (typ.)	0.03	0.03	0.03	0.03	0.03	0.03	%
Full range repeatability (typ.)	±5	±10	X,Y: ±5; Z: ±2	X,Y:±10; Z: ±2	X,Y: ±5; (Q_Z: ±0.2)	X,Y: ±10; (Q_Z: ±0.5)	nm (µrad)	C3
Stiffness	2	1	X,Y: 2; Z: 15	X,Y: 1; Z: 15	X,Y: 2	X,Y: 1	N/µm ± 20 %	D1
Push/pull force capacity (in operating direction)	200 / 30	200 / 30	200 / 30; Z: 50 / 30	200 / 30; Z: 50 / 30	200 / 30	200 / 30	N	D3
Max. (+/-) normal load	50	50	50	50	50	50	N	D4
* Electrical capacitance	11 / Axis	11 / Axis	X,Y: 11; Z: 7.2	X,Y: 11; Z: 7.2	X,Y: 11	X,Y: 11	µF ± 20 %	F1
* Dynamic operating current coefficient (DOCC)	13.7 / Axis	6.9 / Axis	X,Y: 13.7; Z: 38	X,Y: 6.9; Z: 38	X,Y: 13.7	X,Y: 6.9	µA/(Hz x µm)	F2
Unloaded resonant frequency	450	350	450; Z: 800	350; Z: 800	X,Y: 450; Q_Z: 400	X,Y: 350; Q_Z: 300	Hz ± 20 %	G2
Resonant frequency @ 500 g load	250	190	X, Y: 250	X, Y: 190	X,Y 250	X, Y: 190	Hz ± 20 %	G3
Resonant frequency @ 2500 g load	140	110	X, Y: 140	X, Y: 110	X,Y 140	X, Y: 110	Hz ± 20 %	G3
Operating temperature range	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	° C	H2
** Voltage connection	2 x VL	2 x VL	3 x VL (1 x D)	3 x VL (1 x D)	D	D		J1
** Sensor connection	4 x C	4 x C	6 x C (1 x D)	6 x C (1 x D)	D	D		J2
Weight (with cables)	1400	1400	1450	1450	1400	1400	g ± 5 %
Body material	Al	Al	Al	Al	Al	Al		L
Recommended Amplifier/Controller	H, F, L, K	H, F, L, K	H, F, L, K	H, F, L, K	K	K		M

TECHNICAL DATA:
Models	P-557.TCD	P-517.TCD	P-527.TCD	Units	Notes
Active axes	Z, Q_x, Q_y²⁾	Z, Q_x, Q_y²⁾	Z, Q_x, Q_y²⁾
Open loop travel @ 0 to 100 V	50 (±0.28)	100 (±0.56)	200 (±1.13)	µm ± 20 % (mrad ± 20 %)	A2
Closed loop travel ³	50 (±0.25)	100 (±0.5)	200 (±1)	µm (mrad)	A5
Integrated feedback sensor	3x capacitive	3x capacitive	3x capacitive		B
Closed / open loop ¹⁾ resolution £	0.5 (50)	0.5 (50)	1 (100)	nm (nrad)	C1
Closed loop linearity (typ.)	0.03	0.03	0.03	%
Full range repeatability (typ.)	±5 (±0.1)	±5 (±0.1)	±10 (±0.1)	nm (µrad)	C3
Stiffness	Z: 4.0	Z: 2.7	Z: 1.5	N/µm ± 20 %	D1
Push/pull force capacity (in operating direction)	Z: 100/50	Z: 100/50	Z: 100/50	N	D3
Max. (+/-) normal load	50	50	50	N	D4
* Electrical capacitance	Z: 8	Z: 11	Z: 15	µF ± 20 %	F1
* Dynamic operating current coefficient (DOCC)	Z: 20	Z: 13.7	Z: 9.5	µA/(Hz x µm)	F2
Unloaded resonant frequency	Z: 570 Q_x, Q _y :610	Z: 420 Q_x, Q _y: 460	Z: 320 Q_x,Q _y: 330	Hz ± 20 %	G2
Resonant frequency @ 500 g load	Z: 410 Q_x,Q _y: 430	Z: 300 Q_x,Q _y: 310	Z: 190 Q_x,Q _y: 210	Hz ± 20 %	G3
Resonant frequency @ 2500 g load	Z: 240 Q_x,Q _y: 245	Z: 170 Q_x,Q _y: 175	Z: 110 Q_x,Q _y: 120	Hz ± 20 %	G3
Operating temperature range	-20 to 80	-20 to 80	-20 to 80	° C	H2
** Voltage connection	D	D	D		J1
** Sensor connection	D	D	D		J2
Weight (with cables)	1380	1400	1420	g ± 5 %
Body material	Al	Al	Al		L
Recommended Amplifier/Controller	K	K	K		M