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P-762 Family of Piezo Flexure NanoPositioners and Scanners
- 1, 2, 3 and 5 Axis Versions
- Compact Design
- 20 x 20 mm Clear Aperture
- Travel 100 µm, Tilt to 3.4 mrad
All versions but the Z and X-Y-Z versions have a 20 x 20 mm clear aperture. The X-Y model consists of an X module and a slightly modified Y module. The Z-module is equipped with 3 Piezo stacks located on the corners of a triangle. The stacks are selected for equal displacement and electrically connected in parallel. A displacement sensor, mounted in the center of the triangle provides optimum stability. The Z-QX-QY module allows individual control of all three PZTs. The displacement is measured by three sensors. See equation in "Technical Drawings " for tip and tilt calculation. The X-Y-Z version consists of an X-Y module stacked together with a Z module. The X-Y-Z-QX-QY version consists of the X-Y module and the Z-QX-QY module.
Application examples:
ntegrated optics, fiber alignment, semiconductor test equipment, scanning interferometry, disk drive testing, surface structure analysis, confocal microscopy, bio-technology, micromanipulation.
Working principle:
P-762 positioners are equipped with low voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction ultra-high resolution and exceptional guiding precision. Integrated LVDT (Linear Variable Differential Transformer) position feedback sensors provide nanometer scale resolution and stability in closed loop operation (with PI electronics).
New Piezo Flexure NanoPositioning and Scanning Stage Selection Guide: Click Here
