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P-770 Large Aperture XY Piezo Flexure NanoPositioner and Scanner
- Precision Trajectory Control
- For XY Scanning and Positioning
- 200 x 200 mm Clear Aperture
- 200 x 200 µm Range
- Resolution < 10 nm
The 200 x 200 mm clear aperture is ideal for all transmitted light applications such as mask alignment.
Application examples:
Metrology, nanopositioning, semiconductor test equipment, precision mask and wafer alignment, scanning interferometry, surface structure analysis, etc.
Working principle:
P-770 positioners are equipped with low voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated LVDT (Linear Variable Differential Transformer) position feedback sensors provide high resolution and stability in closed loop operation (with PI electronics recommended below).
New Piezo Flexure NanoPositioning and Scanning Stage Selection Guide: Click Here
