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P-770 Large Aperture XY Piezo Flexure NanoPositioner and Scanner
Ordering Information:P-770.00 Large Aperture XY PZT Flexure Stage, 200 µm, LVDT Sensor
See "PZT Control Electronics" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
| TECHNICAL DATA: | |||
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Models |
P-770.00 |
Units |
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|
Active axes |
X,Y |
||
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Open loop travel @ 0 to 100 V |
200 |
µm ± 20 % |
A2 |
|
Closed loop travel ³ |
200 |
µm |
A5 |
|
Integrated feedback sensor |
LVDT |
B |
|
|
Closed / open loop ** resolution £ |
10 / 2 |
nm |
C1 |
|
Closed loop linearity (typ.) |
0.1 |
% |
|
|
Full range repeatability (typ.) |
±20 |
nm |
C3 |
|
Stiffness |
0.2 |
N/µm ± 20 % |
D1 |
|
Push/pull force capacity |
50 / 10 |
N |
D3 |
|
Max. (+/-) normal load |
2 |
kg |
D4 |
|
Electrical capacitance |
14.4 / axis |
µF ± 20 % |
F1 |
|
* Dynamic operating current |
12 / axis |
µA/(Hz x µm) |
F2 |
|
Unloaded resonant frequency |
90 |
Hz ± 20 % |
G2 |
|
Operating temperature range |
- 20 to 80 |
° C |
H2 |
|
Voltage connection *** |
D |
J1 |
|
|
Sensor connection *** |
D |
J2 |
|
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Weight |
2000 |
g ± 5 % |
|
|
Body material |
Al |
L |
|
|
Recommended Amplifier/Controller |
H, F |
M |
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* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately 6 mA drive current.
** Noise equivalent motion with E-503 amplifier.
*** Adapter cable with LEMO connectors for sensor and operating voltage included.
