The Latest Information on Piezo Nanopositioning Systems is Available Here
P-280 PZT Flexure NanoPositioners and Scanners
Ordering Information:P-280.10 Piezo Flexure Stage, 30 µm
P-280.20 Piezo Flexure Stage, 50 µm
P-280.30 Piezo Flexure Stage, 100 µm
See "PZT Control Electronics" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.
| TECHNICAL DATA: | |||||
|
Models |
P-280.10 |
P-280.20 |
P-280.30 |
Units |
|
|
Active axes |
X |
X |
X |
||
|
Open loop travel @ 0 to -1000 V |
30 |
50 |
100 |
µm ± 20 % |
A4 |
|
** Open loop resolution £ |
0.3 |
0.5 |
1 |
nm |
C0 |
|
Stiffness |
1.4 |
1.3 |
0.5 |
N/µm ± 20 % |
D1 |
|
Push/pull force capacity |
50/50 |
50/50 |
50/50 |
N |
D3 |
|
Max. (+/-) normal load |
5 |
5 |
5 |
kg |
D4 |
|
Tilt (Q Y, Q Z) (typ.) |
3 |
7 |
9 |
µrad |
E1 |
|
Lateral runout (Z) (typ.) |
0.3 |
0.6 |
1.4 |
µm |
E2 |
|
Electrical capacitance |
20 |
27 |
70 |
nF ± 20 % |
F1 |
|
* Dynamic operating current |
0.83 |
0.68 |
0.88 |
µA/(Hz x µm) |
F2 |
|
Unloaded resonant frequency |
2200 |
1300 |
660 |
Hz ± 20 % |
G2 |
|
Operating temperature range |
- 40 to 80 |
- 40 to 80 |
- 40 to 80 |
° C |
H2 |
|
Voltage connection |
VH |
VH |
VH |
J1 |
|
|
Weight (with cables) |
37 |
56 |
92 |
g ± 5 % |
|
|
Dimensionss |
30.5 x 15 x 15 |
40.5 x 20 x 20 |
50.5 x 25 x 25 |
mm |
|
|
Mounting grid distance R / |
8.5 / M2.5 |
10 / M3 |
10 / M3 |
mm |
|
|
Æ D x Æ d x t (see drawing) |
5 x 2.7 x 2.7 |
6 x 3.4 x 4 |
6 x 3.4 x 4 |
mm |
|
|
Body material |
Al |
Al |
Al |
L |
|
|
Recommended Amplifier/Controller |
B, I |
B, I |
B, I |
M |
|
* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example (P-280.30): Sinusoidal scan of 30 µm at 10 Hz requires approximately 0.26 mA drive current.
** Noise equivalent motion with E-507 amplifier.
