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P-287 Vertical / Tilt Piezo Flexure Stage

• Vertical Travel to 700 µm
• Tilt to 0.7 degrees
• Non-Magnetic Stainless Steel Design

P-287 is a high resolution, piezoelectrically driven flexure stage providing tilt up to 12 mrad and vertical travel up to 700 µm at the tip. A ball seat is machined into the tip to decouple the rotation if the P-287 is used as a linear drive. In this case an external guiding system is recommended (e.g. frictionless diaphragm spring).

Application examples:
Wafer inspection, nanopositioning, medical analysis, biology, optics.

Working principle:
P-287 positioners are equipped with high voltage piezoelectric drives (0 to -1000 V) integrated into a zero stiction/friction, ultra-high resolution wire EDM (Electric Discharge Machining) cut flexure motion amplifier system. The linear motion of the piezo translator produces an arc motion at the tip.

Low voltage versions of P-287 are available on request.

Options:
P-703.20 high vacuum modification

P-705.00 positive polarity

New Piezo Flexure NanoPositioning and Scanning Stage Selection Guide: Click Here

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