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P-287 Vertical / Tilt Piezo Flexure Stage

Ordering Information
P-287.70 Vertical / Tilt Piezo Flexure Stage, 12 mrad, 700 µm

See "PZT Control Electronics" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.

TECHNICAL DATA:
Models	P-287.70	Units	Notes
Active axes	q X, (Z)
Open loop travel @ 0 to -1000 V	12 (700)	mrad (µm at tip) ± 20 %	A4
** Open loop resolution £	0.2 (7)	µrad (nm at tip)	C0
Stiffness (in operating direction)	0.13 (at tip)	N/µm ± 20 %	D1
Push/pull force capacity (in operating direction)	80/10	N	D3
Electrical capacitance	290	nF ± 20 %	F1
* Dynamic operating current coefficient (DOCC)	30 [0.5 /Hz x µm at tip]	µA/(Hz x mrad)	F2
Unloaded resonant frequency	380	Hz ± 20 %	G2
Operating temperature range	- 40 to 80	° C	H2
Voltage connection	VH		J1
Weight (with cables)	195	g ± 5 %
Body material	N-S		L
Recommended Amplifier/Controller	B, I		M

* Dynamic Operating Current Coefficient in µA per Hertz and mrad (µm).
Example: Sinusoidal scan of 10 mrad at 10 Hz requires approximately 3 mA drive current.

** Noise equivalent motion with E-507 amplifier.

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