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Notes (Technical Data)
A2 Open loop travel @ 0 to 100 VTypical open loop travel at 0 to 100 V operating voltage. Max. operating voltage range is -20 to +120 V, short term only. For details see Lifetime of PZTs in "Tutorial: Piezoelectrics in Positioning" section.
A4 Open loop travel @ 0 to -1000 V
Typical open loop travel at 0 to -1000 V operating voltage. Voltages in excess of -750 V should not be applied for long periods of time. Operation in the range of (+200 to -750 V) is recommended for max. lifetime and displacement. For details see Lifetime of PZTs in "Tutorial: Piezoelectrics in Positioning" section.
A5 Closed loop travel
Travel provided in closed loop operation. PI Piezo amplifiers have an output voltage range of -20 to +120 V to provide enough margin for the controller to compensate for load changes etc.
B Integrated feedback sensor
Absolute measuring capacitive and LVDT (inductive) sensors are used to provide position information to the controller. For details see High Resolution Sensors, page 4.34 in "Tutorial: Piezoelectrics in Positioning" section.
C0 Open loop resolution
Resolution of Piezo Flexure Stages is basically infinite because it is not limited by stiction and friction. Instead of resolution, the noise equivalent motion is specified. Values are typical results (RMS, 1 s), measured with E-507 amplifier module in E-500/501 chassis.
C1 Closed / open loop resolution
Resolution of Piezo Flexure Stages is basically infinite because it is not limited by stiction and friction. Instead of resolution, the noise equivalent motion is specified. Values are typical results (RMS, 1 s), measured with E-503 amplifier module in E-500/501 chassis.
C3 Full range repeatability (typ.)
Typical values in closed loop mode. Repeatability is a percentage of the total angle traveled. For small ranges, repeatability is significantly better.
D1 Stiffness
Static large signal stiffness of the stage in operating direction, at room temperature with 0 V applied to the Piezo actuators. Small signal stiffness and dynamic stiffness may differ because of effects caused by the active nature of piezo material, compound effects, etc. Further details see "Tutorial: Piezoelectrics in Positioning" section, page 4.22.
D3 Push/pull force capacity (in operating direction)
Specifies the maximum force that can be applied to the system. Limited by the Piezo ceramic material and the flexure design. If larger forces are applied, damage to the Piezo, the flexures or the sensor can occur. The force limit has to be considered in dynamic applications, too.
Example: dynamic forces generated by sinusoidal operation at 500 Hz, 20 µm peak-peak, 1 kg moved mass are approximately ± 100 N. Further details see Dynamic Forces, page 4.25 in "Tutorial: Piezoelectrics in Positioning" section.
D4 Max. (+/-) normal load
Maximum load vertical to the operating direction (when the stage is mounted horizontally). Limited by the flexures or the load capacity of the piezo actuators.
D5 Lateral force limit
Maximum lateral force orthogonal to the operating direction. Limited by the Piezo ceramics and the flexures. For XY stages the push/pull force capacity (in operating direction) is also the lateral force limit.
E1 Tilt (typ.)
Typical rotational off-axis error.
E2 Lateral runout (X/Y/Z)
Linear off-axis error.
F1 Electrical capacitance
The Piezo capacitance values indicated in the technical data tables are small signal values (measured at 1 V, 1000 Hz, 20° C, no load; large signal values at room temperature: 30 to 50% up). The capacitance of Piezo ceramics changes with amplitude, temperature, and load, up to 200% of the unloaded, small signal capacitance at room temperature. For detailed information on power requirements, refer to the amplifier frequency response graphs in the "Piezo Control Electronics" section of this catalog.
F2 Dynamic Operating Current Coefficient (DOCC)
Average electrical current (supplied by the amplifier) required to drive a piezo actuator per unit frequency and unit displacement (sine wave operation). E.g. to find out if a selected amplifier can drive a given piezo stage at 50 Hz with 30 µm amplitude, multiply DOC coefficient by 50 and 30 and check if the result is smaller or equal to the output current of the selected amplifier. For details see Dynamic Operation (Analog) in "Tutorial: Piezoelectrics in Positioning" section.
G2 Unloaded resonant frequency
First resonant frequency in operating direction (does not specify the maximum operating frequency). For details see Resonant Frequency in "Tutorial: Piezo-electrics in Positioning" section.
G3 Resonant frequency @ g load
Resonant frequency of the loaded system.
H2 Operating temperature range
Standard range, other temperature ranges on request. Closed Loop Systems are calibrated for optimum performance at room temperature. Recalibration is recommended if operation is at a significantly higher or lower temperature.
J1 Voltage connection
Standard operating voltage connectors are LEMO type connectors.
VL (Voltage Low): LEMO FFA.00.250, male. Cable: coaxial, RG 178, Teflon coated, 1m.
VH (Voltage High): LEMO FFA.0A.250, male. Cable: coaxial, RG 174, PVC coated, 1m.
D: 15 pin D-Sub special connector
For extension cables and adapters, see "Accessories" at the end of "Piezo Control Electronics" section.
J2 Sensor connection
Standard sensor connectors are LEMO type connectors.
C: LEMO FFA.00.250, female.
Cable: coaxial, Teflon coated, 1m.
L: LEMO FFA.0S.304, female.
Cable: PUR coated, 1m.
D: D-Sub special connector
For extension cables and adapters, see "Accessories" at the end of "Piezo Control Electronics" section.
L Body material
Flexure stages are usually made of anodized aluminum or stainless steel. Small amounts of other materials can be used internally (for spring preload, piezo coupling, mounting, thermal compensation, etc.)
Al: Aluminum.
N-S non magnetic stainless steel
S: ferromagnetic stainless steel
I: Invar
M Recommended Amplifier/ Controller
See reference list at the end of "Piezo Control Electronics" section.
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