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The Latest Information on Piezo Nanopositioning Systems is Available Here

Why are PI Piezo NanoPositioners Superior?

Large NanoPositioning Stage (e.g. for Precision Machining...), Small LISA Stage (e.g. for Metrology, Semiconductor..) Mini NanoPositioning Stage (e.g. for Disk Drive Test)

• More than 10 years Experience in Designing Flexure NanoPositioners
• More than 100 different Standard and Custom Models Designed
• More than 25 Years Experience in Designing Piezo Actuators
• Own Piezo Ceramics Factory (PI Ceramic)
• Largest Variety of Controllers (Digital, Analog, High Speed, High Power, OEM....)
• State-of-the-Art Metrology Lab: Thermical, Acoustical, Seismical Isolation
• Own Capacitance Sensor Design & Manufacturing
• Active Trajectory Control
• Patented Vibration Killing Mach (TM) Algorithm for Highest Throughput

PI offers the widest selection of single and multi-axis Piezo Flexure NanoPositioners & Scanners world-wide. We started our first line of NanoPositiong stages with nanometer precision trajectory control in the 1980's and have designed more than 100 different standard and custom models since then. If you can't find what you are looking for on the following pages, contact PI. We are prepared to design your custom NanoPositioner.

PI Piezo Flexure NanoPositioners offer the highest precision of all nanopositioning systems on the market. Key features are active and passive precision trajectory control (sub-nanometer, sub-µrad straightness & flatness), sub-nanometer resolution and stability, 1 to 6 degrees of freedom, ultra-responsive mechanics and control electronics for enhanced throughput.

PI Flexure NanoPositioners are superior to traditional positioners (ball bearings, crossed roller bearings, etc.) in terms of resolution, accuracy, straightness and flatness. Due to the inherent friction, traditional positioners are limited to applications requiring repeatability on the order of 0.5 to 0.1 µm, while PI Flexure NanoPositioners can easily achieve resolution and repeatability in the nano- meter realm and below.

Application examples of PI Piezo Flexure NanoPositioners are:

• Metrology
• Disk Drive Testing
• Nanopositioning
• Semiconductor Test Equipment
• Lithography
• Wafer Steppers
• Mask Alignment
• Precision Machining
  (Out-Of-Roundness Turning, Boring, Grinding)
• Scanning Interferometry
• Surface Structure Analysis
• Scanning Microscopy
• Autofocus Systems
• Bio-Technology

For more information on Piezo Flexure NanoPositioners and piezo actuator basics see "Tutorial: Piezoelectrics in Positioning" section.

New Piezo Flexure NanoPositioning and Scanning Stage Selection Guide: Click Here

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