The Latest Information on Piezo Nanopositioning Systems is Available Here
P-780 Miniature Piezo Flexure NanoPositioners
Ordering Information:P-780.00 Miniature PZT Flexure Stage, 80 µm
P-780.20 Miniature PZT Flexure Stage, 80 µm, LVDT Sensor
See "PZT Control Electronics" section for our comprehen- sive line of low noise, modular and OEM control electronics for computer and manual control.
| TECHNICAL DATA: | ||||
|
Models |
P-780.00 |
P-780.20 |
Units |
|
|
Active axes |
X |
X |
||
|
Open loop travel @ 0 to 100 V |
80 |
80 |
µm ± 20 % |
A2 |
|
Closed loop travel ³ |
- |
80 |
µm |
A5 |
|
Integrated feedback sensor |
- |
LVDT |
B |
|
|
Closed / open loop ** resolution £ |
- / 1 |
10 / 1 |
nm |
C1 |
|
Closed loop linearity (typ.) |
- |
0.1 |
% |
|
|
Full range repeatability (typ.) |
- |
±20 |
nm |
C3 |
|
Stiffness |
1.5 |
1.5 |
N/µm ± 20 % |
D1 |
|
Push/pull force capacity |
50 / 5 |
50 / 5 |
N |
D3 |
|
Max. (+/-) normal load |
1 |
1 |
kg |
D4 |
|
Lateral force limit |
10 |
10 |
N |
D5 |
|
Lateral runout (X/Y/Z) (typ.) |
10 |
10 |
nm |
E2 |
|
Electrical capacitance |
3.6 |
3.6 |
µF ± 20 % |
F1 |
|
* Dynamic operating current coefficient |
5.6 |
5.6 |
µA/(Hz x µm) |
F2 |
|
Unloaded resonant frequency |
1000 |
1000 |
Hz ± 20 % |
G2 |
|
Resonant frequency @ 100 g load |
600 |
600 |
Hz ± 20 % |
G3 |
|
Operating temperature range |
- 20 to 80 |
- 20 to 80 |
° C |
H2 |
|
Voltage connection |
VL |
VL |
J1 |
|
|
Sensor connection |
- |
L |
J2 |
|
|
Weight (with cables) |
150 |
170 |
g ± 5 % |
|
|
Body material |
N-S |
N-S |
L |
|
|
Recommended Amplifier/Controller |
G, C |
H, E |
M |
|
* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 1.7 mA drive current.
** Noise equivalent motion with E-503 amplifier.
