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The Latest Information on Piezo Nanopositioning Systems is Available Here

P-750 Piezo Flexure NanoPositioners and Scanners

• 1 nm Lateral Guiding Precision
• Resolution < 1 nm
• Fast Response
• 75 µm Range
• 10 kg Load Capacity

P-750 Piezo Flexure NanoPositioners are designed to provide motion in one axis with extremely small off-axis errors. They provide a positioning and scanning range up to 75 µm with settling time of a few milliseconds. Closed loop versions with integrated capacitive and LVDT (Linear Variable Differential Transformer) feedback sensors are offered for enhanced accuracy and repeatability.

Application examples:
Metrology, disk drive testing, wafer steppers, semiconductor equipment.

Working principle:
P-750 is equipped with a low voltage piezoelectric drive (0 to 100 V) integrated into a sophisticated flexure guiding system. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated position feedback sensors (LVDT or capacitive) provide subnanometer resolution and stability in closed loop operation (with PI electronics recommended below).

New Piezo Flexure NanoPositioning and Scanning Stage Selection Guide: Click Here

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