The Latest Information on Piezo Nanopositioning Systems is Available Here
P-750 Piezo Flexure NanoPositioners and Scanners
Ordering Information:P-750.00 PZT Flexure Stage, 75 µm
P-750.10 PZT Flexure Stage, 75 µm, LVDT Sensor
P-750.20 PZT Flexure Stage, 75 µm, Capacitive Sensor
See "PZT Control Electronics" section for our comprehensive line of low noise, modular and OEM control elec-tronics for computer and manual control.
| TECHNICAL DATA: | |||||
|
Models |
P-750.00 |
P-750.10 |
P-750.20 |
Units |
|
|
Active axes |
X |
X |
X |
||
|
Open loop travel @ 0 to 100 V |
75 |
75 |
75 |
µm ± 20 % |
A2 |
|
Closed loop travel ³ |
75 |
75 |
75 |
µm |
A5 |
|
Integrated feedback sensor |
- |
LVDT |
capacitive |
B |
|
|
Closed / open loop ** resolution £ |
- / 1 |
10 / 1 |
1 / 1 |
nm |
C1 |
|
Closed loop linearity (typ.) |
- |
0.1 |
0.03 |
% |
|
|
Full range repeatability (typ.) |
- |
±20 |
±3 |
nm |
C3 |
|
Stiffness |
12 |
12 |
12 |
N/µm ± 20 % |
D1 |
|
Push/pull force capacity |
800 / 100 |
800 / 100 |
800 / 100 |
N |
D3 |
|
Max. (+/-) normal load |
10 |
10 |
10 |
kg |
D4 |
|
Lateral force limit |
50 |
50 |
50 |
N |
D5 |
|
Tilt (Q Y, Q Z) (typ.) |
10 |
10 |
10 |
µrad |
E1 |
|
Lateral runout (Y) (typ.) |
1 |
1 |
1 |
nm |
E2 |
|
Electrical capacitance |
9 |
9 |
9 |
µF ± 20 % |
F1 |
|
* Dynamic operating current |
15 |
15 |
15 |
µA/(Hz x µm) |
F2 |
|
Unloaded resonant frequency |
600 |
600 |
600 |
Hz ± 20 % |
G2 |
|
Resonant frequency @ 1900 g load |
250 |
250 |
250 |
Hz ± 20 % |
G3 |
|
Operating temperature range |
- 20 to 80 |
- 20 to 80 |
- 20 to 80 |
° C |
H2 |
|
Voltage connection |
VL |
VL |
VL |
J1 |
|
|
Sensor connection |
- |
L |
2 x C |
J2 |
|
|
Weight (with cables) |
2500 |
2550 |
2550 |
g ± 5 % |
|
|
Body material |
N-S |
N-S |
N-S |
L |
|
|
Recommended Amplifier/Controller |
G, C |
H, E |
H, F, L |
M |
|
* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 4.5 mA drive current.
** Noise equivalent motion with E-503 amplifier.
