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PI - Piezo Nano Positioning
NEW Piezo Tutorial Piezo Actuators Piezo Flexure Stages Piezo Mirrors Piezo Drivers
Theory, Applications and Product Selection Guides of Piezo Actuators, PZT NanoPositioning Systems, Piezo Motors and Ultrafast Steering Mirrors
Design of PZT Stacks Actuator Design of Simple Lever Amplifier
Data showing Impact of Active Trajectory Control on Guiding Precision: Sub-Nanometer Runout
- Introduction
- Advantages of Piezoelectric Positioning Systems
- Applications for Piezo Actuators
- Glossary
- Units and Dimensions
- Basic Introduction to NanoPositioning with Piezoelectric Technology
- Fundamentals of Piezoelectricity and Piezo Actuators
- Amplifier Noise
- Displacement of Piezo Actuators (Piezo Stacks & Contraction Type)
- Hysteresis (open loop PZTs)
- Creep (Drift) (open loop PZTs)
- Aging
- Mechanical Considerations
- Maximum Applicable Forces (Compressive Load Limit, Tensile Load Limit)
- Stiffness
- Force Generation
- Displacement with External Forces
- Mechanical Considerations for Dynamic Operation of PZTs
- Dynamic Forces
- Resonant Frequency
- How Fast Can a Piezo Actuator Expand?
- How to Eliminate Residual Vibration
- Electrical Requirements for Piezo Operation
- General
- Static Operation
- Dynamic Operation (Analog)
- Dynamic Operating Current Coefficient (DOCC)
- Dynamic Operation (Switched)
- Heat Generation in a PZT at Dynamic Operation
- Position Servo Control (Closed Loop Operation)
- PZT Calibration Data
- High Resolution Sensors
- Strain Gage Sensors
- Linear Variable Differential Transformers (LVDTs)
- Capacitive Position Sensors
- Temperature Effects
- Environmental Considerations
- Application of PZTs in Normal Atmosphere
- Application of PZTs in Inert Gas Atmosphere
- Vacuum Application of PZTs
- Lifetime of PZTs
- Basic Designs of Piezoelectric Positioning Elements
- Stack Design
- Laminar Design (Contraction Type Actuator)
- Tube Design
- Bender Type Actuators (Bimorph and Multimorph Design)
- Piezo Actuators with Integrated Lever Motion Amplifier
- PZT Flexure NanoPositioners with Passive and Active Trajectory Control
- Mounting Guidelines
- Electrostrictive Actuators
- Summary
Piezo Steering Platform Solutions
Steering Mirror Tutorial
- Designs
- Single-Axis Tilt Platforms
- A) Single Flexure, Single Actuator Tilt Platform
- B) Differential Piezo Drive Tilt Platform
- Multi-Axis Tilt Platforms
- A) Differential Piezo Drive Tilt Platform
- B) Triple Piezo Drive Tilt Platform
- Dynamic Behavior
Piezo Linear Motors (Ultrasonic Piezomotors)
Micro-Translation Stages with Linear Piezo Motors, Open-Loop and Closed-Loop ModelsM-661, M-662, M-663 Ultra-Compact
Translation Stages, 20 mm Travel (HTML)Download PDF
Watch M-661 demo video
. In this demo, recorded at the 2004 BIOS Show San Jose, an M-661 is reversing directions between two hard stops as fast as possible. The stage exceeds the video frame rate, so listen to the sound for an indication of the real speed.
M-665, 50 mm Travel Low Profile
Closed-Loop Piezo Linear Motor Translation StagesDownload PDF
Linear Piezo Motors for OEM Applications
P-661, P-665 Ultrasonic Piezo Motors for OEMs (HTML)
Download PDF
Rotational Piezo Motors
World's Smallest Rotary Piezo Motor (PDF)
Piezo Steering Mirrors Unidirectional Rotational Piezo Motor
S-224, S-226 qX Ultra-Fast Miniature Piezo Tilt Platform with Mirror S-310, S-311, S-314, S-315, S-316 Ultra-Fast Multi-Axis Tilt Platforms and Z Positioners S-330 qXqY Ultra-Fast Piezo Tip/Tilt Platforms S-340 qXqY Ultra-Fast Piezo Tip/Tilt Platforms Large Piezo Tilt Platforms for Astronomical Applications
Literature References Notes (Technical Data) Tip/Tilt Piezo Positioning Stages (NanoPositioners section): see also
Why are PI Piezo NanoPositioners Superior?
P-500 Flexure Stages
P-762 Flexure Stages
P-287 Tilt Flexure Stage
Advanced Piezo NanoPositioners
Piezo NanoPositioning StagesMicroscope Objective NanoPositioners
Click Here for Piezo Actuator Selection Guide- P-720, P-721 PIFOC Microscope Objective NanoPositioners & Scanners
- P-722, P-723 Microscope Objective NanoPositioners & Scanners
Single Axis Stages
- P-780 Miniature Piezo Flexure NanoPositioners and Scanners
- P-750 Piezo Flexure NanoPositioners and Scanners
- P-752.11C, P-752.21C Miniature Piezo Flexure NanoPositioners and Scanners
- P-753 LISA Linear Piezo Stage Actuator
Multi-Axis Stages
- P-611 NanoCubeTM Closed/Open Loop 3D NanoPositioning Systems
- P-730, P-731 XY Piezo Flexure NanoPositioners and Scanners
- P-500 Multi-Axis Piezo Flexure NanoPositioners and Scanners
- P-762 Family of Piezo Flexure NanoPositioners and Scanners
- P-770 Large Aperture XY Piezo Flexure NanoPositioner and Scanner
For Tip/Tilt Applications see also Tip/Tilt-Platforms
Block Stages (X, XY, XYZ Combinations)
- P-280 Piezo Flexure NanoPositioners and Scanners
- P-281, P-282 XY and XYZ Piezo Flexure NanoPositioners and Scanners
Long Travel Stages
- P-287 Vertical / Tilt Piezo Flexure Stage
- P-290.00 Long Range Piezo Flexure Stage
- Notes (Technical Data)
Why are PI Piezo Actuator Solutions Superior?
- 1998 Katalog Piezoelektrische Aktoren
- PL-022 - 055: PICMA(r) Micro Piezo Actuators
- P-885: PICMA(r) Ceramic Insulated Piezo Actuators
- PICA-Stack Unpackaged Piezo Actuators
- P-249 Miniature Open Loop Piezo Translators
- P-802.00, P-802.10, P-804.10 Open Loop Piezo Translators
- P-305, P-306 Tubular Piezo Stack Translators
- P-810 Small Load Open Loop Piezo Translators
- P-830 Open Loop Piezo Translators
- P-250 Micrometer Mountable Open Loop Piezo Translator
- P-820 Small Load Open Loop Piezo Translators
- P-840, P-841 Preloaded Open & Closed Loop Piezo Translators
- P-842, P-843 Preloaded Open & Closed Loop Piezo Translators
- P-844, P-845 Preloaded Open & Closed Loop Piezo Translators
- P-170 ... P-178 Open & Closed Loop Piezo Translators
- P-244, P-245 Preloaded Open & Closed Loop Piezo Translators
- P-239 Preloaded Open & Closed Loop Piezo Translators
- P-242, P-246 Preloaded Open Closed Loop High Load Piezo Translators
- P-243, P-247 Preloaded Open & Closed Loop EHL Piezo Translators
- P-286, P-288, P-289 Piezo Disk Translators
- PL-122 to PL-140 Multilayer Piezo Bender Actuators
- PT 120 Piezo Tube Actuators
- Customized Solutions for OEM Piezo Ceramic Applications
- Options and Accessories
- Factory Installed Options
- P-177.10 Strain Gage Position Sensor for Piezo Stack Actuators
- Extended Temperature Range
- Vacuum Options
- P-705.00 Positive polarity (for HVPZTs)
- P-706.xx Water Protected Case
- Ball tips
- Accessories
- Cables and Cable Adapters
- P-176.10/20/30 Magnetic Adapter
- P-176.50/60 Flexible Tip
- Notes (Technical Data)
Piezo Drivers, Amplifiers and Controllers
Click Here For Piezo Driver Selection Guide
Why are PI Piezo Drivers, Controllers and Amplifiers Superior?
Digital, High Speed Parallel Port, OEM
Piezoceramic Materials (PZT) »
- E-710.3CD, E-710.4CL High Speed Digital Piezo Driver / Controller
- NanoCapture Software for E-710 Digital Piezo Controller
- E-750.CP High Speed Digital Piezo Driver / Controller
- E-612.C0, E-661.CP High Speed NanoAutomation Driver / Controllers
- E-610 LVPZT Piezo Amplifier/Position Servo Controller Modules, OEM Version
19" and 9.5" Modular
- E-500/E-501 Modular Piezo Driver / Controller Systems (HVPZT Piezo & LVPZT Piezo)
- E-500/E-501 System Configuration
- E-500, E-501 Module Survey & Ordering Examples
High Power
- E-470, E-471, E-472 High Power Modular HVPZT Piezo Drivers / Amplifiers/Controllers
- E-480 High Power HVPZT Piezo Driver / Controller With Energy Recovery
Bench Top
- E-662.LR, E-662.SR LVPZT Piezo Driver /Position Servo Controller
- E-463.00 HVPZT Piezo Driver, 3 Channels
- E-663.00 LVPZT Piezo Driver, 3 Channels
- E-650.00 LVPZT Piezo Drivers for Multilayer "Bimorph" Bender Actuators
Low Power
- E-461.00 HVPZT Piezo Driver
- E-461.OE HVPZT Piezo Driver Module, OEM Version
- E-660.00 LVPZT Piezo Amplifier
- E-660.OE LVPZT Piezo Amplifier Module, OEM Version
- E-650.OE OEM LVPZT Piezo Amplifier for Multilayer "Bimorph" Bender Actuators
Amplifier, Controller, Interface Modules for E-500, E-501, E-470, E-480
- E-503.00 LVPZT Piezo Amplifier Module, 3 Channels
- E-505.00 LVPZT Piezo Amplifier Module
- E-507.00 HVPZT Piezo Driver Module
- E-509 Sensor/Position Servo Control Modules for PZTs
- E-515.i1, E-515.i3 Computer Interface & Display Modules
- E-515.01, E-515.03 Display Modules
- E-530.00 Power Supply for E-500 Systems
- E-531.00 Power Supply for E-501 Systems
- Block Diagram of a typical PI Piezo Amplifier/Position Servo Controller
- Power Requirements / Open Loop Frequency Response
- Position Servo Controller Calibration Information
- Accessories
- Recommended Amplifiers/Controllers Reference List
Piezoceramic Components »
Piezo Actuators
Monolithic Multilayer PZT Actuators
- P-882 - P-888 PICMA™ »
- PL022 - PL-055 PICMA™ »
- PL-112 - PL-140 PICMA™ »
- Controllers for Multilayer
Benders »
High-Force Stacked Piezo Actuators
- P-007- P-056 PICA »
- P-007.xxP - P-056.xxP »
- P-010.xxH - P-025.xxH »
Special Actuators
- P-111- P-151 PICA-Shear
- PT120 - PT140 Piezoceramic
- Custom High-Performance
Benders
Piezo Motors
- Rotationals (PMR 40.08) »
- Ultrasonic Piezo Linear
Piezoceramic Materials (PZT) » Piezoceramic Components »
- P-882 - P-888 PICMA™ Ultra-High-Performance Stack Actuators with Ceramic Insulation, now available from 2x3 to 10x10 mm cross section! »
- PL022 - PL-055 PICMA™ Chip Ultra-Compact Piezo Actuators,
now from 2x2 to 5x5 mm cross section »- PL-112 - PL-140 PICMA™ Multilayer Bender Actuators »
- Controllers for Multilayer Benders »
High-Force Stacked Piezo Actuators
Special Actuators
- P-111- P-151 PICA-Shear Shear Actuators -
Piezo Actuators-Compact Multiaxis Motion »- PT120 - PT140 Piezoceramic Tubes »
- Custom High-Performance Benders
- Packaged Stacks (encapsulated, closed-loop, preloaded) »
- Power Amplifiers and Controllers for Piezoceramic Actuators »
- Piezo Actuators and Nano Transducers»
Piezo Motors
- P-007 - P-056, PICA™-Stack Piezoceramic Actuators — Versatile Piezoelectric Power (HVPZT)
- P-010.xxH · P-016.xxH · P-025.xxH PICA™-Thru Piezoelectric Stack Actuators with Aperture (HVPZT)
- P-010.xxP – P-056.xxP PICA™-Power High-Level Dynamics piezoelectric Actuators (HVPZT)
- P-111 – P-151 PICA™-Shear piezoelectric Actuators—Compact Multiaxis Motion
- P-287 Z/Tilt Piezoelectric Flexure Stage
- P-290 Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator
- P-661 PILine® Miniature High-Speed, Ultrasonic piezoelectric Linear Motor for OEMs
- P-753 LISA piezoelectric NanoAutomation® Stages / Actuators with Direct Metrology
- P-783 Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology
- P-820 Small-Load Open-Loop piezoelectric Translators (LVPZT)
- PICMA® High-Performance Monolithic Multilayer piezoelectric Actuators (LVPZT)
- PL022 · PL033 · PL055 PICMA® Chip Monolithic Multilayer piezoelectric Actuators (LVPZT)
- PL112 – PL140 PICMA® Multilayer piezoelectric Bender Actuators (LVPZT)
- P-871 Closed-Loop, High-Deflection PICMA® Multilayer piezoelectric Bender Actuators (LVPZT)
- PT120 – PT140 Piezoceramic Tubes (HVPZT)
- N-110 NEXLINE® Miniature High-Load piezoelectric Nanopositioning Drive
- N-214 · N-215 NEXLINE® High-Load piezoelectric Nanopositioning Drive
