Piezoelectric Micropumps

Compact Design and High Performance

Micro-diaphragm pumps require compact drives which can provide a continuous flow and variable flow rates. The small volumes per pumping cycle mean high cycle rates of up to several 10 kHz are necessary to achieve high flow rates.

Disk-shaped piezo actuators can be mounted directly on the diaphragm to deflect it. Larger ranges or forces can be achieved if a diaphragm or a piston is coupled directly to a piezoelectric actuator.

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Success Story: Drive Elements Made of Piezoelectric Materials

The Driving Force Behind Highly Accurate Dosing Applications
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