Semiconductor Technology

Lithographic processes are the reason why chips are getting smaller and smaller and why extremely fine structures can be realized on silicon wafers. Atomic force microscopy (AFM) allows surface measurement at highest resolution up to the atomic level, so enabling entirely new inspection methods in the manufacturing of semiconductors. Piezo drives have made these technical advances possible with their performance and reliability.

Lens positioning in lithographic lenses
Nanopositioning systems for 3-D lithography processes