This product has been replaced by the following new product: N-565 Linear Positioner with the Highest Precision


M-683 Dynamic Micropositioning Stage

Low Profile, Linear Encoder

Piezoceramic linear drive with excellent dynamics
Max. velocity 350 mm/s
Low profile: only 21 mm
Travel range 50 mm
Encoder resolution 0.1 µm

Precision-class micropositioning stage

Integrated piezoceramic direct drive. Vacuum-compatible versions to 10-6 hPa are available

 

 

PILine® piezo ultrasonic drive

Self-locking, no heat generation at rest. Excellent start / stop dynamics. Crossed roller guides. Non-contact limit and reference point switches

 

Direct-metrology linear encoder

Excellent linearity and repeatability

 

Fields of application

Research and industry

 


M-683.2U4

Unit

Tolerance

Active axes

X


Motion and positioning

Travel range

50

mm

Integrated sensor

Linear encoder

Sensor resolution

0.1

µm

Min. incremental motion

0.3

µm

typ.

Bidirectional repeatability

±1

µm

typ.

Unidirectional repeatability

0.2

µm

typ.

Pitch

±150

µrad

typ.

Yaw

±50

µrad

typ.

Velocity

350

mm/s

max.

Reference point switch repeatability

±1

µm

typ.


Mechanical properties

Guiding

Crossed-roller bearings

Load capacity

50

N

max.

Push / pull force

6

N

max.

Holding force

6

N

max.


Drive properties

Motor type

PILine® U-164 (dual motor)

Reference point switch

Optical

Limit switches

Hall-effect


Miscellaneous

Operating temperature range

0 to 50

°C

Material

Al (black anodized)

Dimensions

130 mm × 95 mm × 21 mm

Mass

0.65

kg

±5 %

Cable length

1.5

m

±10 mm

Connector

MDR, 14-pin

Recommended controller

C-867 PILine® controller incl. driver

M-683.2V4: Delivery includes 1 m cable (vacuum), feedthrough and 1.5 m cable (air). Specifications for vacuum versions can differ.

Ask about custom designs!

Drawings / Images

M-683.2U4, dimensions in mm

Ordering Information

M-683.2U4
PILine® High-Speed Linear Stage, 50 mm, 6 N
M-683.2V4
PILine® High-Speed Linear Stage, 50 mm, 6 N, Vacuum-Compatible to 10-6 hPa

Accessories

M-110.05

Adapter Bracket for vertical mounting of M-110 series stages on M-683 stages

Ask about custom designs!

Downloads

Documentation

pdf

Short Instructions MP121EK

M-66x, M-68x, U-521, U-62x, U-651 PILine® Stages
3.0.0
All
pdf - 885 KB
pdf
pdf

User Manual MP99

M-683 PILine® High-Speed Linear Stage
pdf - 1 MB
pdf - 1 MB

3D Models

zip

M-683 STEP

All
zip - 62 KB