Piezo Flexure Stages

Nanopositioning Stages and Scanners for Travel Ranges to 1.5 mm

PI's piezo actuator linear stages combine nanometer-precision resolution and guiding precision with minimum crosstalk. This makes them particularly suitable for reference applications in metrology, for microscopic processes, for interferometry or in inspection systems for semiconductor chip production.

Piezo Flexure Linear Stages

Positioning system based on piezoelectric actuators with a travel range of up to 250 µm and a repeatability of around 1 nm.
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P-620.1 – P-629.1 PIHera Piezo Linear Stage

Variable Travel Ranges and Axis Configuration

  • Travel ranges 50 to 1800 µm
  • Resolution to 0.1 nm
  • Positioning accuracy 0.02 %
  • Direct metrology with capacitive sensors
  • X, XY, Z, XYZ versions
PI P-611.1
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P-611.1 Linear Piezo Positioning System

Cost-Effective, Compact Linear Positioning System

  • Compact design: Footprint 44 mm × 44 mm
  • Travel range 120 µm
  • Resolution to 0.2 nm
  • Cost-effective mechanics / electronics system configurations
  • Outstanding lifetime due to PICMA® piezo actuators
  • Z stage, XY, XZ and XYZ versions available
PI P-630
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P-630 High-Dynamics Nanopositioning System

1 Axis with Large Clear Aperture

  • Resonant frequency to 3.25 kHz
  • Travel ranges to 80 µm
  • Small footprint and low-profile height
  • Clear aperture with 30 mm diameter
PI P-712
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P-712 Linear Piezo Scanner

Compact OEM System

  • High dynamics, to 5 ms settling time
  • Travel range up to 40 µm
  • Resolution to 0.2 nm
  • Compact design with low profile, 40 mm × 40 mm × 6 mm
  • Clear aperture 25 mm × 15 mm
  • PICMA® high-power actuators
PI P-753
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P-753 LISA Linear Actuator & Stage

High-Dynamics, Very Stable Piezo Nanopositioner

  • Versatile design: Flexure stage or actuator
  • Travel range to 38 µm
  • Resolution 0.05 nm
  • Direct-drive design for fastest response
  • Highest linearity and stability with capacitive sensors
PI P-752
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P-752 High Precision Nanopositioning Stage

High-Dynamics, Very Stable Piezo Scanner with Extreme Guiding Accuracy

  • Resolution 0.1 nm
  • Rapid response
  • Travel range to 35 µm
  • Highest linearity and stability with capacitive sensors
  • Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Outstanding lifetime due to PICMA® piezo actuators
PI P-750
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P-750 Piezo Nanopositioning System

High-Load Piezo-Driven Nanopositioning Systems with Direct Metrology

  • 1 nm lateral guiding accuracy
  • Frictionless, high-precision flexure guiding system
  • Load capacity to 10 kg
  • Resolution <1 nm
  • Direct metrology with capacitive sensors for highest precision
  • Direct drive for Fast response
  • Travel range 75 µm
  • Outstanding lifetime due to PICMA® piezo actuators
PI P-853
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P-853 • P-854 Piezoelectric Micrometer Drive

Integrated Piezo Drive with Sub-Nanometer Resolution

  • Travel ranges to 18 mm
  • Piezoelectric high-resolution travel to 25 µm
  • Subnanometer resolution
  • Dynamic operation to 10 Hz
  • Alternative for standard micrometer drives
PI P-855.20
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P-855 Piezo Fine Adjustement Drive for Micrometer Screws

Micrometer-Mountable Open-Loop Piezo Translator

  • Travel range 20 µm
  • Mounts inside micrometer tip
  • Sub-ms response time
  • Subnanometer resolution

PIFOC® Objective Positioners and Scanners

PI P-725.4SL
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P-725 PIFOC® Long-Travel Objective Scanner

High-Precision Positioner / Scanner for Microscope Objectives

  • Travel ranges to 460 µm
  • Significantly faster response and higher lifetime than motorized Z stages
  • Scans and positions objectives with sub-nm resolution
  • Direct metrology with capacitive sensors: Optimum linearity
  • Frictionless, high-precision flexure guiding system for better focus stability
  • Compatible with MetaMorph imaging software
  • Outstanding lifetime due to PICMA® piezo actuators
  • QuickLock adapter for easy attachment
  • Clear aperture up to Ø 29 mm
PI P-725.CDD
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P-725.xDD PIFOC® High-Dynamics Piezo Scanner

Nanopositioning and Scanning System for Microscope Objectives

  • Fastest settling time under 5 ms with microscope objective
  • Travel range 18 µm
  • Scans and positions objectives with sub-nm resolution
  • Parallel flexure guiding for minimized objective offset
  • Direct metrology with capacitive sensors for highest linearity
  • Cost-efficient version with SGS sensors
  • Compatible with Metamorph™ imaging software
  • Outstanding lifetime due to PICMA® piezo actuators
  • QuickLock Thread Adapters for easy attachment
PI P-725KHDS
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P-725KHDS PIFOC® Objective Scanner with High Dynamics

Nanometer Resolution for Heavy Objectives

  • Travel range 400 µm
  • Resonant frequency 120 Hz, with 400 g load
  • Step-and-settle 20 ms, with 400 g load
  • QuickLock thread adapters up to M32
PI PD72Z2
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PD72Z2x/4x PIFOC® Objective Scanning System 400 µm

High-dynamics Piezo Drive for Sub-Nanometer Resolution

  • Complete system with digital controller, software and thread adapter
  • Travel ranges to 400 µm
  • Scans and positions objectives with sub-nanometer resolution
  • Frictionless, high-precision flexure guiding system
  • Direct metrology with capacitive sensors
PI P-726
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P-726 PIFOC® High-Load Objective Scanner

High-Dynamics Piezo Z Scanner for Heavy Objectives

  • High-dynamics positioning and scanning for large objectives
  • Resonant frequency 1120 Hz, 560 Hz with 210 g load
  • Typical Step-and-settle about 6 ms
  • Travel range 100 µm
  • Direct-metrology capacitive sensors for best linearity, stability and control dynamics
  • Resolution to 0.3 nm
  • Frictionless, high-precision flexure guiding system for better focus stability
PI P-720
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P-720 PIFOC® – High-Dynamics Piezo Nanofocusing Systems

Compact High-Dynamics Scanner for Small Objectives

  • Travel range 100 µm
  • Rapid response
  • Fast step-and-settle
  • Scans and positions objectives with sub-nm resolution
  • Frictionless, high-precision flexure guiding system
  • Outstanding lifetime due to PICMA® piezo actuators
PI P-721
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P-721 PIFOC® Piezo Flexure Objective Scanner

Fast Nanopositioner and Scanner for Microscope Objectives

  • Scans and positions objectives with sub-nm resolution
  • Travel ranges to 140 µm, millisecond settling time
  • Significantly faster response and higher lifetime than motorized Z stages
  • Parallel precision flexure guiding for better focus stability
  • Direct metrology with capacitive sensors for highest linearity
  • Cost-efficient version with SGS sensors
  • Compatible with MetaMorph imaging software
  • Outstanding lifetime due to PICMA® piezo actuators
  • QuickLock thread adapter for easy attachment
  • Clear aperture up to 29 mm Ø
PI P-721 P-709
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PD72Z1x PIFOC® Objective Scanning System 100 µm

High-Dynamics Piezo Drive for Sub-Nanometer Resolution

  • Complete system with digital controller, software and thread insert
  • Travel range 100 µm
  • Scans and positions objectives with sub-nm resolution
  • Frictionless, high-precision flexure guiding system
  • Direct metrology with capacitive sensors
PI P-915KLPZ
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P-915KLPZ Low-Profile Piezo Objective Scanner

For High Scanning Frequencies

  • Low profile 15 mm
  • Travel range 75 µm
  • Clear aperture for objectives with W0.8 x 1/36'' thread
  • Frictionless, high-precision flexure guiding system for better focus stability and minimized runout
  • Outstanding lifetime due to PICMA® piezo actuators

Piezo Flexure Vertical Stages

PI P-62x.Z
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P-620.Z – P-622.Z PIHera Precision Z-Stage

Variable Travel Ranges and Axis Configuration

  • Travel ranges 50 µm to 250 µm (400 µm open-loop)
  • Resolution to 0.1 nm
  • Positioning accuracy 0.02 %
  • Direct metrology with capacitive sensors
  • X, XY, Z, XYZ versions
PI P-611.Z
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P-611.Z Piezo Z Stage

Compact Nanopositioner

  • Compact: Footprint only 44 mm × 44 mm
  • Travel range 100 µm
  • Resolution to 0.2 nm
  • Cost-effective mechanics / electronics system configurations
  • Frictionless, high-precision flexure guiding system
  • Outstanding lifetime due to PICMA® piezo actuators
  • X, XY, XZ and XYZ versions
PI P-612.Z
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P-612.Z Piezo Z Stage

Compact Nanopositioning Stage with Aperture

  • Travel range 100 µm
  • Resolution to 0.2 nm
  • Linearity error 0.2 %
  • Compact: Footprint 60 mm x 60 mm
  • Very cost-effective controller / piezomechanics systems
  • Frictionless, high-precision flexure guiding system
  • Outstanding lifetime due to PICMA® piezo actuators
PI P-733.Z
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P-733.Z High-Dynamics Z-Nanopositioner / Scanner

Direct Position Metrology and Clear Aperture

  • Travel range 100 µm
  • Direct metrology with capacitive sensors
  • Resolution to 0.3 nm, closed-loop
  • Clear aperture 50 mm × 50 mm
  • Versions with Additional Degrees of Freedom Available
  • XY and XYZ versions also available
  • Vacuum-compatible versions available
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S-303 Piezo Phase Shifter

High-Speed Piezo Phase Shifters with Direct Metrology Option

  • Resonant frequency 25 kHz for sub-millisecond dynamics
  • Capacitive sensor option for highest linearity and stability
  • 3 µm travel range
  • Compact size: Ø 30 mm × 10 mm
  • Open-loop versions with aperture
  • Invar option for highest thermal stability