P-612.Z Piezo Z Stage

Compact Nanopositioning Stage with Aperture

PI P-612.Z
Travel range 100 µm
Resolution to 0.2 nm
Linearity error 0.2 %
Compact: Footprint 60 mm x 60 mm
Very cost-effective controller / piezomechanics systems
Frictionless, high-precision flexure guiding system
Outstanding lifetime due to PICMA® piezo actuators


P-612.ZSL

P-612.Z0L

Unit

Tolerance

Active axes

Z

Z


Motion and positioning

Integrated sensor

SGS

-

Open-loop travel, -20 to +120 V

110

110

µm

min. (20 % / -0 %)

Closed-loop travel

100

-

µm

Open-loop resolution

0.2

0.2

nm

typ.

Closed-loop resolution

1.5

-

nm

typ.

Closed-loop linearity error

0.2

-

%

typ.

Repeatability

±4

-

nm

typ.

Runout θX, θY

±10

±10

µrad

typ.

Crosstalk in X, Y

±20

±20

µm

typ.


Mechanical properties

Stiffness in motion direction

0.63

0.63

N/µm

±20 %

Unloaded resonant frequency

490

490

Hz

±20 %

Resonant frequency under load

420 (30 g)

420 (30 g)

Hz

±20 %

Load capacity

15 / 10

15 / 10

N

max.

Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

Electrical capacitance

3

3

µF

±20 %

Dynamic operating current coefficient

3.8

3.8

µA/(Hzxµm)

±20 %


Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Mass

0.28

0.275

kg

±5 %

Cable length

1.5

1.5

m

±10 mm

Sensor / voltage connection

LEMO

LEMO (no sensor)

The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E -503 amplifier.

Drawings / Images

PI P-612.Z Drawing
PI P-612.ZSL Diagram

Downloads

Datasheet

pdf
pdf

PI Datasheet P-612.Z

Piezo Z Stage Compact Nanopositioning Stage with Aperture
pdf - 788 KB
pdf - 777 KB