P-620.1 – P-629.1 PIHera Piezo Linear Precision Positioner

Variable Travel Ranges and Axis Configuration

Travel ranges 50 to 1800 µm
Resolution to 0.1 nm
linearity error 0.02 %
X, XY, Z versions; XYZ combination possible
Vacuum-compatible versions to 10-9 hPa

Fields of application

  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Test applications
  • Semiconductor technology
  • Photonics
  • Fiber positioning

 

Specifications

Datasheet P-620.1 – P-629.1

Version / Date
2018-02-19
Version / Date
2018-02-19
Document language
pdf - 985 KB
pdf - 989 KB

Drawings / Images

PI P-62x.1 Drawing

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

Versions with Sub-D connector (m)

Versions with LEMO connector

Linear positioner without position sensor

Linear positioner, vacuum compatible to 10-9 hPa

Downloads

Datasheet

Datasheet P-620.1 – P-629.1

Version / Date
2018-02-19
Version / Date
2018-02-19
Document language
pdf - 985 KB
pdf - 989 KB

Documentation

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
Version / Date
2014-07-15
Version / Date
2014-07-15
Document language
pdf - 1,015 KB
pdf - 1 MB

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
Version / Date
4.0.0 2017-02-06
pdf - 635 KB

3-D Models

P-62x.1 STEP

Version / Date
---
zip - 954 KB

Others

Success Story: Optical 3D Surface Measuring Technology

Accurate Profile Reproduction of the Finest Structures Thanks to Piezo Technology and Confocal Technology. Author: Gernot Hamann
Version / Date
pi1135
Version / Date
pi1135
Document language
pdf - 709 KB
pdf - 709 KB