P-620.1 – P-629.1 PIHera Piezo Linear Stage

Variable Travel Ranges and Axis Configuration

Positioning system based on piezoelectric actuators with a travel range of up to 250 µm and a repeatability of around 1 nm.
Travel ranges 50 to 1800 µm
Resolution to 0.1 nm
Positioning accuracy 0.02 %
Direct metrology with capacitive sensors
X, XY, Z, XYZ versions

Reference-class linear positioner

Exceptionally reliable due to the combination of frictionless, maintenance-, and wear-free components. Vacuum-compatible versions to 10-9 hPa

 

 

Integrated lever / guiding module for flexible setup of various axis configurations

Frictionless flexure-guided design for precision guiding combined with lever amplification for long travel ranges. Drive by all-ceramic insulated PICMA® actuators with outstanding lifetime

 

Direct position metrology with capacitive sensors

Contactless measuring method (direct metrology). Frictionless subnanometer resolution. Excellent linearity. High bandwidth up to 10 kHz

 

Fields of application

Research and industry. Vacuum environment to 10-9 hPa


P-620.1CD
P-620.1CL

P-621.1CD
P-621.1CL

P-622.1CD
P-622.1CL

P-625.1CD
P-625.1CL

P-628.1CD
P-628.1CL

P-629.1CD
P-629.1CL

Unit

Tolerance

Active axes

X

X

X

X

X

X


Motion and positioning

Integrated sensor

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Capacitive

Open-loop travel, -20 to 120 V

60

120

300

600

950

1800

µm

min. (20 % / -0 %)

Closed-loop travel

50

100

250

500

800

1500

µm

Closed-loop / open-loop resolution

0.2 / 0.1

0.4 / 0.2

0.7 / 0.4

1.4 / 0.5

1.8 / 0.5

3 / 2

nm

typ.

Closed-loop linearity error

0.02

0.02

0.02

0.03

0.03*

0.03**

%

typ.

Repeatability

±1

±1

±1

±5

±10

±14

nm

typ.

Pitch / yaw

±3

±3

±3

±6

±6

±30 / ±10

µrad

typ.


Mechanical properties

Stiffness in motion direction

0.42

0.35

0.2

0.1

0.12

0.13

N/µm

±20 %

Unloaded resonant frequency

1100

800

400

215

125

125

Hz

±20 %

Resonant frequency @ 20 g

550

520

340

180

115

120

Hz

±20 %

Resonant frequency @ 120 g

260

240

185

110

90

110

Hz

±20 %

Push / pull force capacity in motion direction

10

10

10

10

10

10

N

max.

Load capacity

10

10

10

10

10

10

N

max.

Lateral force

10

10

10

10

10

8

N

max.


Drive properties

Piezo ceramic

PICMA® P-883

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-887

PICMA® P-888

Electrical capacitance

0.35

1.5

3.1

6.2

19

52

µF

±20 %

Dynamic operating current coefficient

0.9

1.9

1.9

1.6

3

4.3

µA / (Hz × µm)

±20 %


Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Dimensions

30 mm × 30 mm × 12 mm

40 mm × 40 mm × 15 mm

50 mm × 50 mm × 15 mm

60 mm × 60 mm × 15 mm

80 mm × 80 mm × 17 mm

100 mm × 100 mm × 22.5 mm

Mass

0.11

0.16

0.2

0.24

0.38

0.72

kg

±5 %

Cable length

1.5

1.5

1.5

1.5

1.5

1.5

m

±10 mm

Sensor / voltage connection

CD versions: Sub-D special

CL versions: LEMO

             

Versions without sensor are available under the P-62x.10L ordering number; operating temperature range -20 to 150 °C. Sensor / voltage connection LEMO.

Vacuum versions to 10-9 hPa are available as P-62x.1UD.

The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value given as noise with E-710 digital controller.

* With digital controller. With analog controllers 0.05 %

** With digital controller. With analog controllers 0.08 %

Drawings / Images

PI P-621.1CD Diagram

Versions with Sub-D connector

P-620.1CD
Precise PIHera Linear Nanopositioning System, 50 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)
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P-621.1CD
Precise PIHera Linear Nanopositioning System, 100 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)
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P-622.1CD
Precise PIHera Linear Nanopositioning System, 250 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)
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P-625.1CD
Precise PIHera Linear Nanopositioning System, 500 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)
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P-628.1CD
Precise PIHera Linear Nanopositioning System, 800 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)
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P-629.1CD
PIHera Linear Piezo Nanopositioning Stage, 1500 µm, Capacitive Sensor, Sub-D Connector(s)
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Versions with LEMO connector

P-620.1CL
Precise PIHera Linear Nanopositioning System, 50 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)
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P-621.1CL
Precise PIHera Linear Nanopositioning System, 100 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)
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P-622.1CL
Precise PIHera Linear Nanopositioning System, 250 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)
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P-625.1CL
Precise PIHera Linear Nanopositioning System, 500 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)
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P-628.1CL
Precise PIHera Linear Nanopositioning System, 800 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)
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P-629.1CL
PIHera Linear Piezo Nanopositioning Stage, 1500 µm, Capacitive Sensor, LEMO Connector(s)
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PIHera linear positioner without position sensor

P-620.10L
Precise PIHera Linear Nanopositioning System, 60 µm, Open-Loop, LEMO Connector(s)
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P-621.10L
Precise PIHera Linear Nanopositioning System, 120 µm, Open-Loop, LEMO Connector(s)
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P-622.10L
Precise PIHera Linear Nanopositioning System, 300 µm, Open-Loop, LEMO Connector(s)
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P-625.10L
Precise PIHera Linear Nanopositioning System, 600 µm, Open-Loop, LEMO Connector(s)
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P-628.10L
Precise PIHera Linear Nanopositioning System, 950 µm, Open-Loop, LEMO Connector(s)
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P-629.10L
Precise PIHera Linear Nanopositioning System, 1800 µm, Open-Loop, LEMO Connector(s)
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PIHera linear positioner, vacuum compatible to 10 hPa

P-620.1UD
Precise PIHera Linear Nanopositioning System, 50 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-621.1UD
Precise PIHera Linear Nanopositioning System, 100 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-622.1UD
Precise PIHera Linear Nanopositioning System, 250 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-625.1UD
Precise PIHera Linear Nanopositioning System, 500 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-628.1UD
Precise PIHera Linear Nanopositioning System, 800 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-629.1UD
PIHera Linear Piezo Nanopositioning Stage, 1500 µm, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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Downloads

Datasheet

pdf
pdf

PI Datasheet P-620.1 – P-629.1

PIHera Piezo Linear Stage Variable Travel Ranges and Axis Configuration
1.0.0
pdf - 809 KB
pdf - 800 KB

Documentation

pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
3.0.0
All
pdf - 984 KB
pdf
pdf

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
1.0.0
pdf - 1,015 KB
pdf - 1 MB

3D Models

zip

P-62x.1 STEP

---
English
zip - 954 KB

Others

pdf
pdf

Success Story: Optical 3D Surface Measuring Technology

Accurate Profile Reproduction of the Finest Structures Thanks to Piezo Technology and Confocal Technology. Author: Gernot Hamann
SUCESS STORY pi1135
pdf - 709 KB
pdf - 709 KB