P-620.Z - P-622.Z PIHera Vertical Precision Positioner

Variable Travel Ranges and Axis Configuration

  • Travel ranges 50 µm to 250 µm (350 µm open loop)
  • Resolution to 0.1 nm
  • Linearity error only 0.02 %
  • Direct position measuring with capacitive sensors
  • X, XY, Z, XYZ versions
P-620.Z - P-622.Z PIHera Vertical Precision Positioner
Product Description Specifications Downloads Quote / Order

Application fields

  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Test applications
  • Semiconductor technology

Outstanding lifetime due to PICMA® piezo actuators

The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

Specifications

Datasheet

Datasheet P-620.Z – P-622.Z

Version / Date
2023-12-12
pdf - 570 KB
Version / Date
2023-12-12
pdf - 580 KB
Version / Date
2018-06-13
pdf - 747 KB

Downloads

Product Note

Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date
2021-04-19
pdf - 377 KB
English

Datasheet

Datasheet

Datasheet P-620.Z – P-622.Z

Version / Date
2023-12-12
pdf - 570 KB
Version / Date
2023-12-12
pdf - 580 KB
Version / Date
2018-06-13
pdf - 747 KB

Documentation

Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date
6.2.0 03/2024
pdf - 561 KB
Version / Date
6.2.0 03/2024
pdf - 595 KB
Documentation

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors

Version / Date
1.3.0 2021-11-03
pdf - 3 MB
Version / Date
1.3.0 2021-11-03
pdf - 3 MB

3-D Models

3-D Models

P-62x.Z 3-D model

zip - 327 KB

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