P-750 Piezo Nanopositioning System

High-Load Piezo-Driven Nanopositioning Systems with Direct Metrology

PI P-750
1 nm lateral guiding accuracy
Frictionless, high-precision flexure guiding system
Load capacity to 10 kg
Resolution <1 nm
Direct metrology with capacitive sensors for highest precision
Direct drive for Fast response
Travel range 75 µm
Outstanding lifetime due to PICMA® piezo actuators


Closed-loop / open-loop travel

Closed-loop / open-loop resolution

Load capacity

Tilt Θ
X
, Θ
Y

Resonant frequency (no load)

P-750.00

– / 75 µm

– / 0.4 nm

100 N

±10 µrad

600 Hz

P-750.20 with capacitive sensor

75 µm / 75 µm

1 nm / 0.4 nm

100 N

±10 µrad

600 Hz

* Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 3.8 mA drive current.

** Resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise equivalent motion with E -503 amplifier.

Drawings / Images

PI P-750 Drawing

Downloads

Datasheet

pdf
pdf

PI Datasheet P-750

Piezo Nanopositioning System High-Load Piezo-Driven Nanopositioning Systems with Direct Metrology
pdf - 731 KB
pdf - 726 KB