P-750 Piezo Nanopositioning System

High-Load Piezo-Driven Nanopositioning Systems with Direct Metrology

PI P-750
1 nm lateral guiding accuracy
Frictionless, high-precision flexure guiding system
Load capacity to 10 kg
Resolution <1 nm
Direct metrology with capacitive sensors for highest precision
Direct drive for Fast response
Travel range 75 µm
Outstanding lifetime due to PICMA® piezo actuators

Specifications

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Drawings / Images

PI P-750 Drawing

Downloads

Datasheet

pdf
pdf

PI Datasheet P-750

Piezo Nanopositioning System High-Load Piezo-Driven Nanopositioning Systems with Direct Metrology
pdf - 731 KB
pdf - 726 KB