P-750 Piezo Nanopositioner

High-Load Piezo-Driven Nanopositioner with Direct Position Measuring

  • 1 nm lateral guiding accuracy
  • Frictionless, high-precision flexure guiding system
  • Load capacity 5 to 10 kg (depending on mounting orientation)
  • Resolution <1 nm
  • Direct metrology with capacitive sensors for highest precision
  • Direct drive for fast response
  • Travel range 75 µm
  • Outstanding lifetime due to PICMA® piezo actuators
P-750 Piezo Nanopositioner
Product Description Specifications Downloads Quote / Order

Outstanding lifetime due to PICMA® piezo actuators

The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

Specifications

Datasheet

Datasheet P-750

Version / Date
2024-01-26
pdf - 434 KB
Version / Date
2024-01-26
pdf - 436 KB

Downloads

Product Note

Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date
2021-04-19
pdf - 377 KB
English

Datasheet

Datasheet

Datasheet P-750

Version / Date
2024-01-26
pdf - 434 KB
Version / Date
2024-01-26
pdf - 436 KB

3-D Models

3-D Models

3-D model P-750.20

zip - 122 KB

Downloads

Downloads

User Manual P750UM0001EN

Version / Date
2024-01-26
pdf - 891 KB
English

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