P-753 LISA Linear Actuator & Stage

High-Dynamics, Very Stable Piezo Nanopositioner

PI P-753
Versatile design: Flexure stage or actuator
Travel range to 38 µm
Resolution 0.05 nm
Direct-drive design for fastest response
Highest linearity and stability with capacitive sensors


P-753.1CD

P-753.2CD

P-753.3CD

Unit

Tolerance

Active axes

X

X

X


Motion and positioning

Integrated sensor

Capacitive

Capacitive

Capacitive

Closed-loop travel

12

25

38

µm

Closed-loop / open-loop resolution

0.05

0.1

0.2

nm

typ., full travel

Linearity error, closed-loop

0.03

0.03

0.03

%

typ.

Repeatability

±1

±2

±3

nm

typ.

Pitch / yaw

±5

±7

±10

µrad

typ.


Mechanical properties

Stiffness in motion direction

45

24

16

N/µm

±20 %

Unloaded resonant frequency

5.6

3.7

2.9

kHz

±20 %

Resonant frequency @ 200 g

2.5

1.7

1.4

kHz

±20 %

Push / pull force capacity in motion direction

100 / 20

100 / 20

100 / 20

N

max.

Load capacity (vertical / horizontal mounting)

10 / 2

10 / 2

10 / 2

kg

max.


Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

PICMA® P-885

Electrical capacitance

1.5

3.1

4.6

µF

±20 %

Dynamic operating current coefficient

12

15

15

µA / (Hz × µm)

±20 %


Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

°C

Material

Steel

Steel

Steel

Dimensions

44 mm × 30 mm × 15 mm

62 mm × 30 mm × 15 mm

80 mm × 30 mm × 15 mm

Mass

0.16

0.215

0.26

kg

±5 %

Cable length

1.5

1.5

1.5

m

±10 mm

Sensor / voltage connection

Sub-D Special

Sub-D Special

Sub-D Special

The resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise-equivalent motion with the E-503 piezo amplifier module

Versions with LEMO connector available as P-753.x1C.

Vacuum versions to 10-9 hPa are available under the following ordering number: P-753.xUD.

Non-magnetic versions available as P-753.xND.

Ask about custom designs!

Drawings / Images

PI P-753.1 Drawing
PI P-753.2 Drawing
PI P-753.3 Drawing

Versions with Sub-D connector

P-753.1CD
LISA High-Dynamics Piezo Nanopositioning System, 12 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)
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P-753.2CD
LISA High-Dynamics Piezo Nanopositioning System, 25 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)
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P-753.3CD
LISA High-Dynamics Piezo Nanopositioning System, 38 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s)
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Versions with LEMO connector

P-753.11C
LISA High-Dynamics Piezo Nanopositioning System, 12 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)
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P-753.21C
LISA High-Dynamics Piezo Nanopositioning System, 25 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)
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P-753.31C
LISA High-Dynamics Piezo Nanopositioning System, 38 µm, Direct Metrology, Capacitive Sensor, LEMO Connector(s)
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Vacuum versions

P-753.1UD
LISA High-Dynamics Piezo Nanopositioning System, 12 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-753.2UD
LISA High-Dynamics Piezo Nanopositioning System, 25 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-753.3UD
LISA High-Dynamics Piezo Nanopositioning System, 38 µm, Direct Metrology, Capacitive Sensor, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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Non-magnetic versions available as P-753.xND.

Ask about custom designs!

Downloads

Datasheet

pdf
pdf

User Manual PZ254

P-753 LISA High-Dynamics Piezo Nanopositioning Systems
1.0.0
pdf - 925 KB
pdf - 891 KB
pdf
pdf

PI Datasheet P-753

LISA Linear Actuator & Stage High-Dynamics, Very Stable Piezo Nanopositioner
pdf - 846 KB
pdf - 840 KB

3D Models

zip

P-753 STEP

English
zip - 415 KB