P-915KVPZ Vacuum-Compatible Z Piezo Stage

High Load, High Dynamics and Large Clear Aperture

PI P-915KVPZ
Travel range 45 µm
Large clear aperture 273 mm × 273 mm
Direct metrology with capacitive sensors
Direct drive for high dynamics and stiffness
Vacuum-compatible to 10-6 hPa
Outstanding lifetime due to PICMA® piezo actuators


Travel

Resolution

Push / pull force capacity

Material

Dimensions

P-915KVPZZ Stage

45 µm

0.3 nm

200 N

Steel

Moving platform 375 mm × 375 mm

Clear aperture 273 mm × 273 mm

Downloads

Datasheet

pdf
pdf

PI Datasheet P-915KVPZ

Vacuum-Compatible Z Piezo Stage High Load, High Dynamics and Large Clear Aperture
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pdf - 640 KB
pdf - 640 KB