A-123 PIglide AT3 Linear Stage with Air Bearings

High Performance Nanopositioning Stage

A-123 PIglide AT3 Linear Stage with Air Bearings
Product Description Specifications Downloads Quote / Order
  • Ideal for scanning applications or high-precision positioning
  • Cleanroom compatible
  • Size of the motion platform 210 mm × 210 mm
  • Travel ranges 50 mm to 750 mm
  • Resolution to 1 nm

Product Overview

The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.

A high-force linear motor can drive the stage to top speed within a few milliseconds, and the high-capacity bearings can support payloads up to 60 kg. The laterally opposed, actively preloaded air bearing design in this model allows mounting in any orientation.

Accessories and options

 

  • Encoder
  • PIglide filter and air preparation kits
  • Single and multi-axis motion controller
  • XY setups and individual configurations
  • Cable track variations
  • Options with counterweight for vertical (Z) orientation
  • Customizations available
  • Base plates made of granite and systems for reducing vibration

Application fields

PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Specifications

Datasheet A-123

Version / Date
2018-07-27
Version / Date
2018-07-27
Version / Date
2018-08-16
Document language
pdf - 698 KB
pdf - 709 KB
pdf - 807 KB

Downloads

Product Note

Product Change Notification A-xxx.*C1

Version / Date
2018-08-02
Document language English
pdf - 71 KB

Datasheet

Datasheet A-123

Version / Date
2018-07-27
Version / Date
2018-07-27
Version / Date
2018-08-16
Document language
pdf - 698 KB
pdf - 709 KB
pdf - 807 KB

Documentation

User Manual A123D0001

A-123 PIglide AT3 Series Linear Air Bearing Stage, Linear Motor Driven with Encoder Feedback
Version / Date
2016-12-02
Document language English
pdf - 1 MB

3-D Models

A-123 STEP

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

Travel range 50 mm

A-123.050A1
PIglide AT3 Linear Stage, Air Bearing, 50 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
A-123.050C1
PIglide AT3 Linear Stage, Air Bearing, 50 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V

Travel range 100 mm

A-123.100A1
PIglide AT3 Linear Stage, Air Bearing, 100 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
A-123.100C1
PIglide AT3 Linear Stage, Air Bearing, 100 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V

Travel range 150 mm

A-123.150A1
PIglide AT3 Linear Stage, Air Bearing, 150 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
A-123.150C1
PIglide AT3 Linear Stage, Air Bearing, 150 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V

Travel range 200 mm

A-123.200A1
PIglide AT3 Linear Stage, Air Bearing, 200 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
A-123.200C1
PIglide AT3 Linear Stage, Air Bearing, 200 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V

Travel range 350 mm

A-123.350A1
PIglide AT3 Linear Stage, Air Bearing, 350 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
A-123.350C1
PIglide AT3 Linear Stage, Air Bearing, 350 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V

Travel range 500 mm

A-123.500A1
PIglide AT3 Linear Stage, Air Bearing, 500 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
A-123.500C1
PIglide AT3 Linear Stage, Air Bearing, 500 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V

Travel range 750 mm

A-123.750A1
PIglide AT3 Linear Stage, Air Bearing, 750 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V
A-123.750C1
PIglide AT3 Linear Stage, Air Bearing, 750 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V

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