LMS-180 Precision Linear Stage
High Dynamics due to Magnetic Direct Drive, Excellent Travel Accuracy
- Travel ranges to 508 mm (20")
- Velocity to 500 mm/s
- Incremental encoder with 15 nm resolution
Reference-class linear stage
High travel accuracy with recirculating ball bearings. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp).
Multi-axis combinations with the directly driven rotation stages of the UPR series.
Versions with DC servo or stepper motors are available with the same footprint.
Magnetic direct drive
Ironless magnetic direct drive for high velocity and acceleration. High position resolution.
Fields of application
Industry and research. Metrology, precision scanning in semiconductor or electronics manufacturing.
Specifications
Specifications
68509111 / 68509121 / 68509131 / 68509141 / 68509151 | Unit | Tolerance | |
---|---|---|---|
Motion and positioning | |||
Active axes | X | ||
Travel range | 155 / 205 / 305 / 408 / 508 | mm | |
Integrated sensor | Incremental encoder | ||
Sensor resolution* | 15 | nm | |
Minimum incremental motion | 0.04 | µm | typ. |
Unidirectional repeatability | 0.05 | µm | typ. |
Bidirectional repeatability | ±0.15 | µm | typ. |
Pitch | ±40 / ±50 / ±60 / ±70 / ±80 | µrad | typ. |
Yaw | ±50 | µrad | typ. |
Straightness | ±2 / ±3 / ±4 / ±5 / ±6 | µm | typ. |
Flatness | ±2 / ±3 / ±4 / ±5 / ±6 | µm | typ. |
Velocity | 500 | mm/s | max. |
Mechanical properties | |||
Load capacity in z | 250 | N | max. |
Load capacity in y | 500 | N | max. |
Moved mass | 0.9 | kg | |
Overall mass | 10.2 / 10.4 / 11.5 / 12.8 / 14.2 | kg | |
Linear guiding | Recirculating ball bearings | ||
Drive properties | |||
Drive type | Linear motor, ironless | ||
Intermediate circuit voltage | 48 | VDC | max. |
Peak force | 150 | N | typ. |
Nominal force | 50 | N | typ. |
Peak current, effective | 7.5 | A | typ. |
Nominal current, effective | 3.2 | A | typ. |
Force constant, effective | 19.9 | N/A | typ. |
Resistance per phase | 1.8 | Ω | typ. |
Inductivity per phase | 0.6 | mH | typ. |
Back EMF phase-phase | 16 | Vs/m | max. |
Limit switches | Inductive | ||
Miscellaneous | |||
Operating temperature range | 10 to 50 | °C | |
Humidity | 20 – 90% rel., not condensing | ||
Material | Aluminum, black anodized | ||
Recommended controller | SMC Hydra, ACS SPii+EC and other industrial solutions |
* With SMC Hydra controller.
Downloads
Product Note
Product Change Notification Motor Driven Products
Datasheet
Documentation
User Manual LMS-180
Precision Linear Stage
3-D Models
LMS-180 3-D model
Quote / Order
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