LMS-180 Precision Linear Stage

High Dynamics due to Magnetic Direct Drive, Excellent Travel Accuracy

LMS-180 Precision Linear Stage
Product Description Specifications Downloads Quote / Order
PI LMS-180
LMS-180 Drawing
Direction of the axes and moments for linear stages
  • Travel ranges to 508 mm (20")
  • Velocity to 500 mm/s
  • Incremental encoder with 15 nm resolution

Reference-class linear stage

High travel accuracy with recirculating ball bearings. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp).

Multi-axis combinations with the directly driven rotation stages of the UPR series.

Versions with DC servo or stepper motors are available with the same footprint.

 

Magnetic direct drive

Ironless magnetic direct drive for high velocity and acceleration. High position resolution.

Fields of application

Industry and research. Metrology, precision scanning in semiconductor or electronics manufacturing.

Download datasheet Go to specifications

Specifications

Datasheet

Datasheet LMS-180

Version / Date
2017-04-19
Version / Date
2017-04-19
Version / Date
2017-08-08
Document language
Download
pdf - 656 KB
Download
pdf - 660 KB
Download
pdf - 737 KB
Go to download

Separate connection cable required for motor and sensor connection respectively.

Downloads

Product Note

Product Note

Product Change Notification Motor Driven Products

Version / Date
2021-04-19
Document language English
Download
pdf - 917 KB

Datasheet

Datasheet

Datasheet LMS-180

Version / Date
2017-04-19
Version / Date
2017-04-19
Version / Date
2017-08-08
Document language
Download
pdf - 656 KB
Download
pdf - 660 KB
Download
pdf - 737 KB

Documentation

Documentation

User Manual LMS-180

Precision Linear Stage
Version / Date
MAN_LMS-180_9_EN_01.PDF
Version / Date
2017-04-21
Document language
Request download link

3-D Models

3-D Models

LMS-180 3-D model

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