- Travel ranges to 508 mm (20")
- Velocity to 500 mm/s
- Incremental encoder with 15 nm resolution
Reference-class linear stage
High travel accuracy with recirculating ball bearings. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp).
Multi-axis combinations with the directly driven rotation stages of the UPR series.
Versions with DC servo or stepper motors are available with the same footprint.
Magnetic direct drive
Ironless magnetic direct drive for high velocity and acceleration. High position resolution.
Fields of application
Industry and research. Metrology, precision scanning in semiconductor or electronics manufacturing.
Product Change Notification Motor Driven Products
User Manual LMS-180
Precision Linear Stage
LMS-180 3-D model
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