LMS-180 Precision Linear Stage

High Dynamics due to Magnetic Direct Drive, Excellent Travel Accuracy

Travel ranges to 508 mm (20")
Velocity to 500 mm/s
Incremental encoder with 15 nm resolution

LMS-180, dimensions in mm. LS-010: Cable for linear encoder

Direction of the axes and moments for linear stages

High travel accuracy with recirculating ball bearings. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 V_pp).

Multi-axis combinations with the directly driven rotation stages of the UPR series.

Versions with DC servo or stepper motors are available with the same footprint.

Ironless magnetic direct drive for high velocity and acceleration. High position resolution.

Industry and research. Metrology, precision scanning in semiconductor or electronics manufacturing.

Download datasheet specifications

Datasheet

Version / Date

2017-04-19

pdf - 656 KB

Version / Date

2017-04-19

pdf - 660 KB

Version / Date

2017-08-08

pdf - 737 KB

Download

	68509111 / 68509121 / 68509131 / 68509141 / 68509151	Unit	Tolerance
Motion and positioning
Active axes	X
Travel range	155 / 205 / 305 / 408 / 508	mm
Integrated sensor	Incremental encoder
Sensor resolution*	15	nm
Minimum incremental motion	0.04	µm	typ.
Unidirectional repeatability	0.05	µm	typ.
Bidirectional repeatability	±0.15	µm	typ.
Pitch	±40 / ±50 / ±60 / ±70 / ±80	µrad	typ.
Yaw	±50	µrad	typ.
Straightness	±2 / ±3 / ±4 / ±5 / ±6	µm	typ.
Flatness	±2 / ±3 / ±4 / ±5 / ±6	µm	typ.
Velocity	500	mm/s	max.
Mechanical properties
Load capacity in z	250	N	max.
Load capacity in y	500	N	max.
Moved mass	0.9	kg
Overall mass	10.2 / 10.4 / 11.5 / 12.8 / 14.2	kg
Linear guiding	Recirculating ball bearings
Drive properties
Drive type	Linear motor, ironless
Intermediate circuit voltage	48	VDC	max.
Peak force	150	N	typ.
Nominal force	50	N	typ.
Peak current, effective	7.5	A	typ.
Nominal current, effective	3.2	A	typ.
Force constant, effective	19.9	N/A	typ.
Resistance per phase	1.8	Ω	typ.
Inductivity per phase	0.6	mH	typ.
Back EMF phase-phase	16	Vs/m	max.
Limit switches	Inductive
Miscellaneous
Operating temperature range	10 to 50	°C
Humidity	20 – 90% rel., not condensing
Material	Aluminum, black anodized
Recommended controller	SMC Hydra, ACS SPii+EC and other industrial solutions

* With SMC Hydra controller.

Download datasheet downloads

Product Note

Version / Date

2021-04-19

pdf - 917 KB

English

Download

Datasheet

Version / Date

2017-04-19

pdf - 656 KB

Version / Date

2017-04-19

pdf - 660 KB

Version / Date

2017-08-08

pdf - 737 KB

Download

Documentation

Precision Linear Stage

Version / Date

MAN_LMS-180_9_EN_01.PDF

pdf - 925 KB

Version / Date

2017-04-21

pdf - 930 KB

3-D Models

zip - 11 MB

quote / order

Separate connection cable required for motor and sensor connection respectively.

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

68509111

LMS-180 High-Dynamics Precision Linear Stage, Ironless Linear Motor, 155 mm (6") Travel Range, Linear Encoder with Sin/Cos Signal Transmission

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68509121

LMS-180 High-Dynamics Precision Linear Stage Ironless Linear Motor, 205 mm (8") Travel Range, Linear Encoder with Sin/Cos Signal Transmission

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68509131

LMS-180 High-Dynamics Precision Linear Stage, Ironless Linear Motor, 305 mm (12") Travel Range, Linear Encoder with Sin/Cos Signal Transmission

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68509141

LMS-180 High-Dynamics Precision Linear Stage, Ironless Linear Motor, 408 mm (16") Travel Range , Linear Encoder with Sin/Cos Signal Transmission

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