H-824 6-Axis Hexapod

Low-Profile, Precision Parallel-Kinematic System

PI H-824
Load capacity to 10 kg, self-locking version
Travel ranges to 45 mm / 25°
Actuator resolution to 7 nm
Min. incremental motion to 0.3 µm
Repeatability to ±0.1 µm / ±2.5 µrad
Velocity to 25 mm/s
Vacuum-compatible versions available
Sophisticated controller using vector algorithms, virtual pivot point
Comprehensive software package

Precision-class 6-axis positioning system

Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction. Vacuum-compatible versions to 10-6 hPa are available

Compact due to folded drive design

H-824.Gxx with DC gear motors

H-824.Dxx with powerful DC motors for higher velocity

Powerful digital controller, open software architecture

User-defined, stable pivot point, software-selectable. Positions commanded in Cartesian coordinates. Macro programming. Open source LabVIEW driver set. Work space simulation software. Virtual Hexapod machine software. Optional: Collision avoidance software (external obstacles).

Hexapods are by default configured and delivered as a system including a controller

  • C-887.52 compact bench-top controller for a lower system price. Digital I/O interfaces, e.g. for external triggering
  • C-887.11 19" controller, comprises the control for two additional single axes with servo motors. Options: Control of piezo axes, photometer cards for visible light or infrared light range

Upgrades for C-887.11 (order separately)

  • Analog interface/photometer cards for visible light (F-206.VVU) or the infrared light range (F-206.iiU)
  • F-206.NCU fast piezo nano-alignment system for alignment with nanometer precision

Accessories

  • C-887.MC manual control unit for Hexapods, USB, 3 m cable
  • C-887.VM1 PIVeriMove software for collision checking

Fields of application

Research and industry, standard and vacuum environments. For micromanipulation, biotechnology, semiconductor manufacturing


H-824.Gxx

H-824.Dxx

Unit

Tolerance

for higher resolution and load

for higher velocity

Active axes

X, Y, Z, θX, θY, θZ X, Y, Z, θX, θY, θZ


Motion and positioning

Travel range* X, Y

±22.5

±22.5

mm

Travel range* Z

±12.5

±12.5

mm

Travel range* θX, θY

±7.5

±7.5

°

Travel range* θZ

±12.5

±12.5

°

Single-actuator design resolution

0.007

0.5

µm

Min. incremental motion X, Y, Z

0.3

1

µm

typ.

Min. incremental motion θX, θY, θZ

3.5

12

µrad

typ.

Backlash X, Y

3

1

µm

typ.

Backlash Z

1

1

µm

typ.

Backlash θX, θY

20

15

µrad

typ.

Backlash θZ

25

25

µrad

typ.

Repeatability X, Y

±0.5

±0.5

µm

typ.

Repeatability Z

±0.1

±0.1

µm

typ.

Repeatability θX, θY

±2

±2

µrad

typ.

Repeatability θZ

±2.5

±2.5

µrad

typ.

Max. velocity X, Y, Z

1

25

mm/s

Max. velocity θX, θY, θZ

11

270

mrad/s

Typ. Velocity X, Y, Z

0.5

10

mm/s

Typ. Velocity θX, θY, θZ

5.5

55

mrad/s


Mechanical properties

Stiffness X, Y

1.7

1.7

N/µm

Stiffness Z

7

7

N/µm

Load (base plate horizontal / any orientation)

10 / 5

5 / 2.5

kg

max.

Holding force, de-energized (base plate horizontal / any orientation)

100 / 50

15 / 5

N

max.

Motor type

DC gear motor

DC motor


Miscellaneous

Operating temperature range

-10 to 50

-10 to 50

°C

Material

Aluminum

Aluminum

Mass

8

8

kg

±5 %

Cable length

3

3

m

±10 mm

Vacuum versions to 10-6 hPa are available under the following ordering number: H-824.xVx. Specifications for vacuum versions can differ.

Technical data specified at 20 ±3 °C.

Ask about custom designs!

* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in this table shows its maximum travel, where all other axes are at their zero positions. If the other linear or rotational coordinates are not zero, the available travel may be less.

Drawings / Images

PI H-824 Drawing
H-824.G2
Compact Hexapod Microrobot, DC Motor Gearhead, 1 mm/s, 10 kg Load, Sub-D Connector, Cable Set 3 m
add to cart add to cart
in cart remove from cart
H-824.D2
Compact Hexapod Microrobot, Direct Drive, 25 mm/s, 5 kg Load, Sub-D Connector, Cable Set 3 m
add to cart add to cart
in cart remove from cart

Vacuum versions

H-824.G2V
Compact Hexapod Microrobot, DC Motor Gearhead, 0.5 mm/s, 5 kg Load, Vacuum-Compatible to 10-6 hPa, Sub-D Connector, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable
add to cart add to cart
in cart remove from cart
H-824.D2V
Compact Hexapod Microrobot, Direct Drive, 12.5 mm/s, 2.5 kg Load, Vacuum-Compatible to 10-6 hPa, Sub-D Connector(s), 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable
add to cart add to cart
in cart remove from cart

Recommended controller

C-887.52
6D Hexapod Controller, TCP/IP, RS-232, Bench-Top Device, Control of Two Additional Servo-Motor Axes Included
add to cart add to cart
in cart remove from cart

Accessories

C-887.MC
Hexapod Control Unit, USB Connector, 3 m Cable
add to cart add to cart
in cart remove from cart
C-887.VM1
PIVeriMove Software for the Collision Check
add to cart add to cart
in cart remove from cart

Hexapod systems with fieldbus interface

H-824.D31
Compact Hexapod Microrobot, Direct Drive, 25 mm/s, 5 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, EtherCAT® Interface
add to cart add to cart
in cart remove from cart

Configuration options (to be ordered as a system)

H-824.G11
Compact Hexapod Microrobot, DC Motor Gearhead, 1 mm/s, 10 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis
add to cart add to cart
in cart remove from cart
H-824.D11
Compact Hexapod Microrobot, Direct Drive, 25 mm/s, 5 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis
add to cart add to cart
in cart remove from cart

Vacuum versions

H-824.GV1
Compact Hexapod Microrobot, DC Motor Gearhead, 0.5 mm/s, 5 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis
add to cart add to cart
in cart remove from cart
H-824.DV1
Compact Hexapod Microrobot, Direct Drive, 12.5 mm/s, 2.5 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis
add to cart add to cart
in cart remove from cart

Upgrades (to be ordered separately)

F-206.NCU
Rapid 3-Axis Piezo Nanopositioning System for Use in Combination with Hexapod Systems. Consists of P-611.3SF NanoCube® XYZ Nanopositioning System, 100 µm × 100 µm × 100 µm, Strain Gauge Sensors with Integrated Fiber Adapter Interface and E-760.3S0 NanoCube® Piezo Controller Board, ISA Bus
add to cart add to cart
in cart remove from cart
F-206.iiU
Photometer Card, IR Range, 2 Channels
add to cart add to cart
in cart remove from cart
F-206.VVU
Photometer Card, Visible Range, 2 Channels
add to cart add to cart
in cart remove from cart

Ask about custom designs!

Downloads

Datasheet

pdf
pdf

PI Datasheet H-824

6-Axis Hexapod Low-Profile, Precision Parallel-Kinematic System
2016-03-01 R1
pdf - 826 KB
pdf - 819 KB

Documentation

pdf

Technical Note H824T0005

H-824.D2, H-824.D2V, H-824.G2, H-824.G2V Compact Hexapod Microrobots
2016-01-22
English
pdf - 773 KB

3D Models

zip

H-824 STEP

---
English
zip - 9 MB

Others

pdf
pdf

User Manual MS200

H-824 Compact Microrobot
1.2.0
pdf - 2 MB
pdf - 2 MB