H-850 6-Axis Hexapod

For Loads of up to 250 kg

Load capacity to 250 kg
Repeatability to ±0.2 µm
Travel ranges to 100 mm / 60°
Actuator resolution to 5 nm
MTBF 20,000 h
Works in any orientation
Linear and rotary multi-axis scans
Vacuum-compatible versions available
Sophisticated controller using vector algorithms, virtual pivot point
Extensive software support

Reference-class 6-axis positioning system

Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction. Vacuum-compatible versions to 10-6 hPa are available

Drive variants

H-850.Hxx with DC gear motors for heavy loads

H-850.Gxx with powerful DC motors for higher velocity Heavy-duty, ultra-high-resolution bearings for 24/7 applications

Powerful digital controller, open software architecture

User-defined, stable pivot point, software-selectable. Positions commanded in Cartesian coordinates. Macro programming. Open source LabVIEW driver set. Work space simulation software. Virtual Hexapod machine software. Optional: Collision avoidance software (external obstacles).

Hexapods are by default configured and delivered as a system including a controller

  • C-887.52 compact bench-top controller for a lower system price. Digital I/O interfaces, e.g. for external triggering
  • C-887.11 19" controller, comprises the control for two additional single axes with servo motors. Options: Control of piezo axes, photometer cards for visible light or infrared light range

Upgrades for C-887.11 (order separately)

  • Analog interface/photometer cards for visible light (F-206.VVU) or the infrared light range (F-206.iiU)
  • F-206.NCU fast piezo nano-alignment system for alignment with nanometer precision

Accessories

  • C-887.MC manual control unit for Hexapods, USB, 3 m cable
  • C-887.VM1 PIVeriMove software for collision checking

Fields of application

Research and industry, standard and vacuum environments. For astronomy, optics positioning, aviation and aerospace


H-850.Hxx

H-850.Gxx

Unit

Tolerance

for higher loads and holding forces

for higher velocity and precision

Active axes

X, Y, Z, θX, θY, θZ X, Y, Z, θX, θY, θZ


Motion and positioning

Travel range* X, Y

±50

±50

mm

Travel range* Z

±25

±25

mm

Travel range* θX, θY

±15

±15

°

Travel range* θZ

±30

±30

°

Single-actuator design resolution

0.005

0.05

µm

Min. incremental motion X, Y

1

1

µm

typ.

Min. incremental motion Z

0.5

0.5

µm

typ.

Min. incremental motion θX, θY, θZ

5

5

µrad

typ.

Backlash X, Y

4

5

µm

typ.

Backlash Z

1

1.5

µm

typ.

Backlash θX, θY

15

25

µrad

typ.

Backlash θZ

30

45

µrad

typ.

Repeatability X, Y

±1

±0.5

µm

typ.

Repeatability Z

±0.3

±0.2

µm

typ.

Repeatability θX, θY

±5

±3

µrad

typ.

Repeatability θZ

±9

±6

µrad

typ.

Max. velocity X, Y, Z

0.5

8

mm/s

Max. velocity θX, θY, θZ

6

100

mrad/s

Typ. velocity X, Y, Z

0.3

5

mm/s

Typ. velocity θX, θY, θZ

3

50

mrad/s


Mechanical properties

Stiffness X, Y

7

7

N/µm

Stiffness Z

100

100

N/µm

Load (base plate horizontal / any orientation)

250 / 50

50 / 20

kg

max.

Holding force, de-energized (base plate horizontal / any orientation)

2000 / 500

250 / 85

N

max.

Motor type

DC motor, gearhead

DC motor, gearhead


Miscellaneous

Operating temperature range

-10 to 50

-10 to 50

°C

Material

Aluminum

Aluminum

Mass

17

17

kg

±5 %

Cable length

3

3

m

±10 mm

Vacuum versions to 10-6 hPa are available under the following ordering number: H-850.xV. Specifications for vacuum versions can differ.

Technical data specified at 20±3 °C.

Ask about custom designs!

* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in this table shows its maximum travel, where all other axes are at their zero positions. If the other linear or rotational coordinates are not zero, the available travel may be less.
H-850.G2
Hexapod Microrobot with Excellent Position Repeatability, DC Motor Gearhead, 8 mm/s, 50 kg Load, Sub-D Connector, Cable Set 3 m
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H-850.H2
Hexapod Microrobot with Excellent Position Repeatability, DC Motor Gearhead, 0.5 mm/s, 250 kg Load, Sub-D Connector(s), Cable Set 3 m
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Vacuum versions

H-850.G2V
Hexapod Microrobot with Excellent Position Repeatability, DC Motor Gearhead, 2.5 mm/s, 25 kg Load, Vacuum-Compatible to 10-6 hPa, Sub-D Connector(s), 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable
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H-850.H2V
Hexapod Microrobot with Excellent Position Repeatability, DC Motor Gearhead, 0.15 mm/s, 80 kg Load, Vacuum-Compatible to 10-6 hPa, Sub-D Connector(s), 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable
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Recommended controller

C-887.52
6D controller for Hexapods, TCP/IP, RS-232, bench-top, incl. control of two additional axes
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Accessories

C-887.MC
Manual control unit for Hexapods, USB, 3 m cable
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C-887.VM1
PIVeriMove software for collision checking
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Hexapod systems with fieldbus interface

H-850.G31
Hexapod Microrobot with Excellent Position Repeatability, DC Motor Gearhead, 8 mm/s, 50 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, EtherCAT Interface
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H-850.H31
Hexapod Microrobot with Excellent Position Repeatability, DC Motor Gearhead, 0.5 mm/s, 250 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, EtherCAT Interface
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Configuration options (to be ordered as a system)

H-850.G11
Hexapod Microrobot with Excellent Position Repeatability, DC Motor Gearhead, 8 mm/s, 50 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis
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H-850.H11
Hexapod Microrobot with Excellent Position Repeatability, DC Motor Gearhead, 0.5 mm/s, 250 kg Load, Cable Set 3 m, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis
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Vacuum versions

H-850.GV1
Hexapod Microrobot with Excellent Position Repeatability, DC Motor Gearhead, 2.5 mm/s, 25 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis
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H-850.HV1
Hexapod Microrobot with Excellent Position Repeatability, DC Motor Gearhead, 0.15 mm/s, 80 kg Load, Vacuum-Compatible to 10-6 hPa, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable, with 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes Included, TCP/IP and RS-232 Interface, 19'' Chassis
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Optional Upgrades

(if required, please order in addition)

F-206.NCU
Rapid 3-Axis Piezo Nanopositioning System for Use in Combination with Hexapod Systems. Consists of P-611.3SF NanoCube® XYZ Nanopositioning System, 100 µm × 100 µm × 100 µm, Strain Gauge Sensors with Integrated Fiber Adapter Interface and E-760.3S0 NanoCube® Piezo Controller Board, ISA Bus
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F-206.iiU
Photometer Card, IR Range, 2 Channels
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F-206.VVU
Photometer Card, Visible Range, 2 Channels
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Ask about custom designs!

Drawings / Images

PI Hexapods are delivered as complete turnkey systems. In addition to the ordered controller configuration, immediate use is provided for with the included communication and interconnecting cables, peripheral devices and a substantial software package. Th

Downloads

Datasheet

pdf
pdf

PI Datasheet H-850

6-Axis Hexapod for Loads of up to 250 kg
pdf - 869 KB
pdf - 862 KB

Documentation

pdf
pdf

User Manual MS202E

H-850 Hexapod Microrobot with Excellent Position Repeatability
1.1.0
pdf - 2 MB
pdf - 2 MB

3D Models

zip

H-850 STEP

English
zip - 4 MB