M-850KTVH Vacuum Hexapod 6-Axis Positioner

Parallel-Kinematics System for Wide Temperature Ranges

PI M-850KTVH
Six Degrees of Freedom, works in any orientation
Vacuum-compatible to 10-6 hPa
200 kg load capacity (vertical) 2000 N
Repeatability to ±1 µm
Encoder resolution to 5 nm

Specifications

pdf
pdf

PI Datasheet M-850KTVH

Vacuum Hexapod 6-Axis Positioner Parallel-Kinematics System for Wide Temperature Ranges
pdf - 685 KB
pdf - 684 KB

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Datasheet

pdf
pdf

PI Datasheet M-850KTVH

Vacuum Hexapod 6-Axis Positioner Parallel-Kinematics System for Wide Temperature Ranges
pdf - 685 KB
pdf - 684 KB