P-562.6CD PIMars 6-Axis Piezo Stage System

High-Precision Nanopositioning System with 6 Degrees of Freedom

PI Multi-Axis Piezo Scanner
6 motion axes: 3 × linear, 3 × rotational
Travel ranges to 200 µm linear and to 1 mrad tilt angle
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Highest linearity and stability with capacitive sensors
Frictionless, high-precision flexure guiding system
Excellent Scan-Flatness
Clear aperture 66 mm × 66 mm
Outstanding lifetime due to PICMA® piezo actuators
UHV-compatible to 10-9 hPa

Specifications

pdf
pdf

PI Datasheet P-562.6CD

PIMars 6-Axis Piezo Stage System High-Precision Nanopositioning System with 6 Degrees of Freedom
pdf - 747 KB
pdf - 745 KB

Drawings / Images

Downloads

Datasheet

pdf
pdf

PI Datasheet P-562.6CD

PIMars 6-Axis Piezo Stage System High-Precision Nanopositioning System with 6 Degrees of Freedom
pdf - 747 KB
pdf - 745 KB

3D Models

zip

P-562.6CD STEP

English
zip - 809 KB