UPR-120 Ultraprecision Rotation Stage

Excellent Stability and Travel Accuracy

PI UPR-120
Unlimited travel range
Velocity to 360 °/s
Incremental angle measuring system with 0.00002° resolution
Clear aperture with 35 mm diameter
Optional: Air bearings for optimized flatness

Reference-class rotation stage

High travel accuracy. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp)

Magnetic direct drive

Ironless magnetic direct drive (torque motor) for high velocity and acceleration. High position resolution.

Fields of application

Industry and research. Metrology, semiconductor manufacturing and testing, synchrotron applications

Specifications

pdf
pdf

Datasheet UPR-120

Ultra Precision Rotation Stage
2017-03-08
pdf - 866 KB
pdf - 869 KB

Drawings / Images

PU UPR-120 Drawing

Downloads

Datasheet

pdf
pdf

Datasheet UPR-120

Ultra Precision Rotation Stage
2017-03-08
pdf - 866 KB
pdf - 869 KB

Documentation

pdf

PI miCos Technical Data Linear and Rotary Encoders

Technical Data of Linear Encoders (LE) and Rotary Encoders (RE/AE)
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English
pdf - 83 KB
pdf

PI miCos Motors & Encoders: DC-Brush Motors

Technical Data of DC-Brush Motors
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English
pdf - 78 KB

3D Models

zip

UPR-120 STEP

English
zip - 3 MB