D-015 • D-050 • D-100 Capacitive Sensors

Sub-Nanometer-Resolution Position Sensors

PI D-015
For applications requiring highest precision
Measurement range to 1000 µm
Resolution to 0.01 nm
Linearity error to 0.01 % with digital controller
Bandwidth to 10 kHz
Servo controller E-509.CxA, compatible with E-500 piezo controller system
Custom designs

Specifications

pdf
pdf

PI Datasheet D-015 • D-050 • D-100

Capacitive Sensors Sub-Nanometer-Resolution Position Sensors
pdf - 929 KB
pdf - 927 KB

Drawings / Images

PI D-015 Drawing
PI D-050 Drawing
PI D-100 Drawing
PI D-015 Diagram

Downloads

Datasheet

pdf
pdf

PI Datasheet D-015 • D-050 • D-100

Capacitive Sensors Sub-Nanometer-Resolution Position Sensors
pdf - 929 KB
pdf - 927 KB

Documentation

pdf

User Manual PZ106

D-015, D-050, D-100 Capacitive Sensors
English
pdf - 228 KB