D-015 • D-050 • D-100 Capacitive Sensors

Subnanometer-Resolution Position Sensors

PI D-015
For applications with the highest precision requirements
Measuring range to 1000 µm
Resolution to 0.01 nm
Linearity error to 0.01 % with digital controller
E-509.CxA control electronics, compatible with E-500 piezo controller system

Resolution

Capacitive sensors achieve resolutions into the picometer range over shorter distances. The theoretical measuring resolution is unlimited. In practice, scatter radiation, geometrical effects, and the measuring electronics noise influence the achievable accuracy. In conjunction with the E-509.C1A electronics, the effective noise factor of the D-100.00 sensors (100 µm) is 0.02 nm/ÖHz. Corresponds for example, to a resolution of 0.2 nm with 100 Hz bandwidth. The jumper-adjustable bandwidth of the electronics is up to 3 kHz.

In addition to the standard sensors listed here, PI offers customized versions, e.g., in measuring, geometry, material, electronics etc.

Fields of application

High-precision positioning.

Specifications

Datasheet D-015 • D-050 • D-100

Version / Date
2018-04-06
Version / Date
2018-04-06
Document language
pdf - 563 KB
pdf - 565 KB

Drawings / Images

Motion of a piezo nanopositioning system with 0.3 nm steps, measured with a capacitive sensor from PI (lower curve) and with a highly accurate laser interferometer (model Zygo ZMI 2000, upper curve). The capacitive sensor shows a significantly higher resolution than the interferometer.
D-100.00, dimensions in mm
D-050.00, dimensions in mm
D-015.00, dimensions in mm

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

Downloads

Datasheet

Datasheet D-015 • D-050 • D-100

Version / Date
2018-04-06
Version / Date
2018-04-06
Document language
pdf - 563 KB
pdf - 565 KB

Documentation

User Manual PZ106

D-015, D-050, D-100 Capacitive Sensors
Version / Date
2003-11-05
Document language English
pdf - 228 KB