E-852KOEM PISeca OEM Position Sensor

Capacitive Single-Electrode Sensor and Signal Conditioner

PI E-852KOEM PISeca
System solution for PISeca capacitive position sensors
Cost-efficient for OEM applications
20 µm measurement range and 3 kHz bandwidth
ILS circuitry optimizes capacitive sensor linearity

PISeca capacitive sensor and signal conditioner

Single-electrode sensor with excellent position resolution and OEM electronics with fixed measurement range and bandwidth. Minimum noise, excellent long-term stability. Synchronization for multiple channel measurement.

 

Measurement principle

Direct, contactless measurement of actual position (Direktmetrologie). Use of electric field for measuring the change of capacitance between the probe and a conductive target surface without physical contact. Thanks to this contactless, frictionless measurement there is no wear or hysteresis and a high phase fidelity is achieved.

 

Customer-specific application of sensor, bandwidth and measurement range

The E-852KOEM can be offered in similar design with any D-510 PISeca sensor. The measurement range is between 20 and 500 µm, depending on the measurement range of the selected PISeca sensor. Bandwidth options: For highest accuracy and low-noise measurement with sub-nanometer resolution, it can be limited to 10 Hz; for high-dynamics applications with a resolution in the 1 nm range, it is 10 kHz maximum.

 

Integrated linearization system (ILS) for highest accuracy

The ILS compensates the influences of parallelism errors between sensor and measurement surface and guarantees an excellent measuring linearity, with an error below 1 %.

 

Fields of application

Halbleiterfertigung / semiconductor industry, data storage, automotive industry, metrology, precision machining

 

 

Specifications

pdf
pdf

PI Datasheet E-852KOEM

PISeca OEM Position Sensor Capacitive Single-Electrode Sensor and Signal Conditioner
pdf - 668 KB
pdf - 667 KB

Downloads

Datasheet

pdf
pdf

PI Datasheet E-852KOEM

PISeca OEM Position Sensor Capacitive Single-Electrode Sensor and Signal Conditioner
pdf - 668 KB
pdf - 667 KB