P-541.2 • P-542.2 XY Piezo Stage

Low-Profile XY Nanopositioning System with Large Aperture

PI P-541.SL
Low profile for easy integration: 16.5 mm
Clear aperture 80 mm × 80 mm
Travel range to 200 µm × 200 µm
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
High-dynamics direct-drive version
Choice of sensors: Strain gauge (lower cost) or capacitive sensors (higher performance)
Outstanding lifetime due to PICMA® piezo actuators
Combination with long-travel microscopy stages for longer stroke


P-541.2CD /
P-541.2CL

P-542.2CD /
P-542.2CL

P-541.2DD

P-541.2SL

P-542.2SL

P-541.20L / P-542.20L

Unit

Tolerance

Active axes

X, Y

X, Y

X, Y

X, Y

X, Y

X, Y

 

 


Motion and positioning

 

 

 

 

 

 

 

 

Integrated sensor

Capacitive

Capacitive

Capacitive

SGS

SGS

 

 

Open-loop travel, -20 to +120 V

150 µm × 150 µm

250 µm × 250 µm

60 µm × 60 µm

150 µm × 150 µm

250 µm × 250 µm

see P-541.2CD / P-542.2CD

min. (20 % / -0 %)

Closed-loop travel

100 µm × 100 µm

200 µm × 200 µm

45 µm × 45 µm

100 µm × 100 µm

200 µm × 200 µm

 

Closed-loop / open-loop resolution

0.2 / 0.3

0.4 / 0.7

0.1 / 0.3

0.2 / 2.5

0.4 / 4

open-loop 0.2 / 0.4

nm

typ.

Linearity error

0.03

0.03

0.03*

0.2

0.2

%

typ.

Repeatability

<5

<5

<5

<10

<10

nm

typ.

Pitch

<5

<5

<3

<5

<5

<5

µrad

typ.

Yaw

<10

<10

<3

<10

<10

<10

µrad

typ.


Mechanical properties

 

 

 

 

 

 

 

 

Stiffness in motion direction

0.47

0.4

10

0.47

0.4

0.47 / 0.4

N/µm

±20 %

Resonant frequency, no load

255

230

1550

255

230

255 / 230

Hz

±20 %

Resonant frequency, under load, at 100 g

200

190

200

190

200 / 190

Hz

±20 %

Resonant frequency, under load, at 200 g

180

1230

180

180 / –

Hz

±20 %

Resonant frequency, under load, at 300 g

150

145

150

145

150 / 145

Hz

±20 %

Push / pull force capacity in motion direction

100 / 30

100 / 30

100 / 30

100 / 30

100 / 30

100 / 30

N

max.

Load capacity

20

20

20

20

20

20

N

max.


Drive properties

 

 

 

 

 

 

 

 

Piezo ceramic

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

 

 

Electrical capacitance per axis

4.2

7.5

9

4.2

7.5

4.2 / 7.5

µF

±20 %

Dynamic operating current coefficient per axis

5.2

4.8

25

5.2

4.8

5.2 / 4.8

µA / (Hz × µm)

±20 %


Miscellaneous

 

 

 

 

 

 

 

 

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

 

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

 

 

Mass

0.75

0.75

0.75

0.73

0.73

0.7

kg

±5 %

Cable length

1.5

1.5

1.5

1.5

1.5

1.5

m

±10 mm

Sensor connection

Sub-D Special / LEMO

Sub-D Special / LEMO

Sub-D Special

LEMO

LEMO

 –

 

 

Voltage connection

Sub-D Special / LEMO

Sub-D Special / LEMO

Sub-D Special

LEMO

LEMO

LEMO

 

 

* With digital controller. Non-linearity of direct drive stages measured with analog controllers is up to 0.1 % typ.

Drawings / Images

PI P-54x.2 Drawing
PI P-541.2DD Diagram

Downloads

Datasheet

pdf
pdf

PI Datasheet P-541.2 • P-542.2

XY Piezo Stage Low-Profile XY Nanopositioning System with Large Aperture
pdf - 776 KB
pdf - 765 KB

Documentation

pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
3.0.0
All
pdf - 984 KB
pdf
pdf

User Manual PZ244

P-541, P-542 XY Nanopositioning System with Large Clear Aperture
1.0.0
pdf - 687 KB
pdf - 683 KB
pdf
pdf

Overview Microscopy Accessories

PI Microscopy Sample Holders and Adapter Plates for Microscope Stages
pdf - 760 KB
pdf - 763 KB

3D Models

zip

P-541.2 STEP

All
zip - 3 MB
zip

P-542.2 STEP

All
zip - 3 MB