P-620.2 – P-629.2 PIHera XY Piezo Stage

High-Precision XY Nanopositioning Systems with Variable Travel Ranges

Travel ranges 50 to 1800 µm
Resolution to 0.1 nm
Positioning accuracy 0.02 %
Direct metrology with capacitive sensors
X, XY, Z, XYZ versions

Specifications

pdf
pdf

PI Datasheet P-620.2 – P-629.2

PIHera XY Piezo Stage High-Precision XY Nanopositioning Systems with Variable Travel Ranges
pdf - 904 KB
pdf - 872 KB

Drawings / Images

PI P-62x.2 Drawing
P-629.20L
Precise PIHera XY Nanopositioning System, 1800 µm × 1800 µm, Open-Loop, LEMO Connector(s)
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P-629.2UD
PIHera XY Piezo Nanopositioning Stage, 1500 µm ×1500 µm, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-620.2CD
Precise PIHera XY Nanopositioning System, 50 µm × 50 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-620.2CL
Precise PIHera XY Nanopositioning System, 50 µm × 50 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)
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P-621.20L
Precise PIHera XY Nanopositioning System, 60 µm × 60 µm, Open-Loop, LEMO Connector(s)
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P-620.2UD
Precise PIHera XY Nanopositioning System, 50 µm × 50 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-621.2CD
Precise PIHera XY Nanopositioning System, 100 µm × 100 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-621.2CL
Precise PIHera XY Nanopositioning System, 100 µm × 100 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)
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P-621.20L
Precise PIHera XY Nanopositioning System, 120 µm × 120 µm, Open-Loop, LEMO Connector(s)
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P-621.2UD
Precise PIHera XY Nanopositioning System, 100 µm × 100 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-622.2CD
Precise PIHera XY Nanopositioning System, 250 µm × 250 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-622.2CL
Precise PIHera XY Nanopositioning System, 250 µm × 250 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)
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P-622.20L
Precise PIHera XY Nanopositioning System, 300 µm × 300 µm, Open-Loop, LEMO Connector(s)
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P-622.2UD
Precise PIHera XY Nanopositioning System, 250 µm × 250 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-625.2CD
Precise PIHera XY Nanopositioning System, 500 µm × 500 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-625.2CL
Precise PIHera XY Nanopositioning System, 500 µm × 500 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)
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P-625.20L
Precise PIHera XY Nanopositioning System, 600 µm × 600 µm, Open-Loop, LEMO Connector(s)
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P-625.2UD
Precise PIHera XY Nanopositioning System, 500 µm × 500 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-628.2CD
Precise PIHera XY Nanopositioning System, 800 µm × 800 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s)
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P-628.2CL
Precise PIHera XY Nanopositioning System, 800 µm × 800 µm, Direct Metrology, Capacitive Sensors, LEMO Connector(s)
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P-628.20L
Precise PIHera XY Nanopositioning System, 1000 µm × 1000 µm, Open-Loop, LEMO Connector(s)
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P-628.2UD
Precise PIHera XY Nanopositioning System, 800 µm × 800 µm, Direct Metrology, Capacitive Sensors, Sub-D Connector(s), Vacuum-Compatible to 10-9 hPa
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P-629.2CD
PIHera XY Piezo Nanopositioning Stage, 1500 µm ×1500 µm, Capacitive Sensors, Sub-D Connector(s)
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P-629.2CL
PIHera XY Piezo Nanopositioning Stage, 1500 µm × 1500 µm, Capacitive Sensors, LEMO Connector(s)
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Downloads

Datasheet

pdf
pdf

PI Datasheet P-620.2 – P-629.2

PIHera XY Piezo Stage High-Precision XY Nanopositioning Systems with Variable Travel Ranges
pdf - 904 KB
pdf - 872 KB

Documentation

pdf
pdf

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
1.0.0
pdf - 1,015 KB
pdf - 1 MB
pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
4.0.0 2017-02-06
pdf - 635 KB

3D Models

zip

P-62x.2 STEP

zip - 1,011 KB

Software Files

zip

PI Press Release P-620 PIHera

zip - 991 KB