P-628KHFS Long-Travel XY Piezo Stage with Nanometer Flatness

Active Z-Axis Design Provides Real-Time Runout Compensation

PI P-628KHFS
Closed-loop travel range 800 µm × 800 µm (to 1500 µm possible)
Flatness of travel <1 nm
High-precision, cost-efficient
Resolution to 0.1 nm
Positioning accuracy 0.02 %
Frictionless, high-precision flexure guiding system
Outstanding lifetime due to PICMA® piezo actuators


Travel ranges

Resonant frequency, no load

Load capacity

Dimensions

P-628KHFS high flatness XY stage

800 µm × 800 µm (X, Y)

75 Hz (X), 105 Hz (Y)

10 N

80 mm × 80 mm × (9.5 + 30) mm

Downloads

Datasheet

pdf
pdf

PI Datasheet P-628KHFS

Long-Travel XY Piezo Stage with Nanometer Flatness Active Z-Axis Design Provides Real-Time Runout Compensation
pdf - 643 KB
pdf - 643 KB

Documentation

pdf
pdf

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
1.0.0
pdf - 1,015 KB
pdf - 1 MB