P-628KHFS Long-Travel XY Piezo Stage with Nanometer Flatness

Active Z-Axis Design Provides Real-Time Runout Compensation

PI P-628KHFS
Closed-loop travel range 800 µm × 800 µm (to 1500 µm possible)
Flatness of travel <1 nm
High-precision, cost-efficient
Resolution to 0.1 nm
Positioning accuracy 0.02 %
Frictionless, high-precision flexure guiding system
Outstanding lifetime due to PICMA® piezo actuators

Specifications

pdf
pdf

Datasheet P-628KHFS

pdf - 643 KB
pdf - 643 KB

Ordering Information

This product is currently not in our price list.

It is an example of what is feasible with our technology. We would like to work with you on a solution that fits your needs.
P-628KHFS
Long-Range XY Nanopositioning System, 800 µm × 800 µm, PicoPlane High-Flatness Option

Downloads

Datasheet

pdf
pdf

Datasheet P-628KHFS

pdf - 643 KB
pdf - 643 KB

Documentation

pdf
pdf

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors
2014-07-15
2014-07-15
pdf - 1,015 KB
pdf - 1 MB