P-734 XY Piezo Scanner

High-Dynamics System with Minimum Runout and Clear Aperture

PI P-734.2CL
Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Travel range 100 µm × 100 µm
Clear aperture 56 mm × 56 mm
Capacitive sensors for resolution <0.4 nm
Outstanding lifetime due to PICMA® piezo actuators


P-734.2CL

P-734.2CD

Unit

Tolerance

Active axes

X, Y

X, Y


Motion and positioning

Integrated sensor

Capacitive

Capacitive

Open-loop travel, -20 to 120 V

110 µm × 110 µm

110 µm × 110 µm

min. (+20 %/-0 %)

Closed-loop travel

100 µm × 100 µm

100 µm × 100 µm

Open-loop resolution

0.2

0.2

nm

typ.

Closed-loop resolution

0.3

0.3

nm

typ.

Linearity error

0.03

0.03

%

typ.

Repeatability

<2.5

<2.5

nm

typ.

Pitch

<3

<3

µrad

typ.

Yaw

<10

<10

µrad

typ.

Flatness

typ. <5max. 10

typ. <5max. 10

nm


Mechanical properties

Stiffness

3

3

N/µm

±20 %

Resonant frequency, no load

500

500

Hz

±20 %

Resonant frequency at 200 g

350

350

Hz

±20 %

Resonant frequency at 500 g

250

250

Hz

±20 %

Push / pull force capacity in motion direction

300 / 100

300 / 100

N

max.

Load capacity

20

20

N

max.


Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

Electrical capacitance

6.2

6.2

µF

±20 %

Dynamic operating current coefficient

7.8

7.8

µA / (Hz × µm)

±20 %


Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

°C

Material

Aluminum

Aluminum

Mass (with cables)

1.04

1.04

kg

±5 %

Cable length

1.5

1.5

m

±10 mm

Sensor connection

2 × LEMO

Sub-D Special

Voltage connection

4 × LEMO

Sub-D Special

Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 10 µm at 10 Hz requires approximately 7.8 mA drive current.

Recommended controller / amplifier

P-734.2CL: E-500 modular piezo controller system with E-503 amplifier module (multi-channel) or E-505 (1 per axis, high performance) and E-509 controller

P-734.2CD: Multi-channel digital controllers: E-710 / E-725 bench-top, E-712 modular, E-725 high-power, E-761 PCI board

Drawings / Images

Downloads

Datasheet

pdf
pdf

PI Datasheet P-734

XY Piezo Scanner, high- dynamics system with minimum runout and clear aperture
pdf - 810 KB
pdf - 804 KB

Documentation

pdf

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
3.0.0
All
pdf - 603 KB
pdf
pdf

User Manual PZ103

P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors
1.0.0
pdf - 858 KB
pdf - 863 KB

3D Models

zip

P-734 STEP

English
zip - 1 MB