P-763 Compact XY Nanopositioning System

With Clear Aperture

PI P-763
Travel range 200 µm
High positional stability and resolution with capacitive sensors
Small footprint with a 70 mm side length
Large clear aperture 30 mm × 30 mm

Precision-class nanopositioning system

2 axes, serial kinematics. Frictionless flexure joints with mechanical lever motion amplifiers. Capacitive position sensors for maximum stability and linearity

PICMA® high-performance piezo drive

Piezoceramic actuators with all-ceramic insulation. Longer lifetime, humidity resistance and operating temperatures to 80 °C

Fields of application

Sample handling and positioning in research and industry, also suitable for transmitted-light applications


Preliminary data

P-763.22C

Unit

Active axes

X, Y


Motion and positioning

Integrated sensor

Capacitive sensors

Closed-loop travel in X, Y

200

µm

Open-loop resolution in X, Y

1

nm

Closed-loop resolution in X, Y

2

nm

Linearity error in X, Y

0.02

%

Repeatability X, Y

±5

nm


Mechanical properties

Loaded resonant frequency in X

180 Hz (260 g)

Hz

Load capacity

10

N


Drive properties

Piezoceramics

PICMA® P-887

Electrical capacitance in X, Y

12.8

µF


Miscellaneous

Operating temperature range

-20 to 80

°C

Material

Aluminum, steel

Dimensions

70 mm × 70 mm × 25 mm

Clear aperture

30 mm × 30 mm

Cable length

1.5

m

Connection

1× Sub-D Mix, 1 channel, for X and Y respectively

Drawings / Images

PI P-763 Drawing

Downloads

Datasheet

pdf
pdf

PI Datasheet P-763

Compact XY Nanopositioning System With Clear Aperture
pdf - 754 KB
pdf - 752 KB

Documentation

pdf
pdf

User Manual PZ258

P-763.22C XY Nanopositioning System with Small Footprint and Large Aperture
1.0.0
pdf - 733 KB
pdf - 704 KB